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application/pdfIEEEIEEE Sensors Journal; ;PP;99;10.1109/JSEN.2021.3130953Thin-Film PZT based Multi-Channel Acoustic MEMS Transducer for Cochlear Implant ApplicationsAcoustic TransducerFully Implantable Cochlear ImplantMEMSThin Film PiezoelectricMuhammed Berat YukselAziz KoyuncuogluHaluk Kulah
IEEE Sensors Journal19910.1109/JSEN.2021.3130953PP1
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