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An Alternative In-situ Fluorination Source for Atomic Layer Deposition
Date
2022-08-22
Author
TUNÇKANAT, MERYEM
DEMİRDOĞAN, ÖZGE
İmer, Muhsine Bilge
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This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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URI
https://nanotr.meetinghand.net/en/
https://hdl.handle.net/11511/106193
Conference Name
NANOTR-16, 16th Nanoscience and Nanotechnology Conference
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Department of Metallurgical and Materials Engineering, Conference / Seminar
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M. TUNÇKANAT, Ö. DEMİRDOĞAN, and M. B. İmer, “An Alternative In-situ Fluorination Source for Atomic Layer Deposition,” presented at the NANOTR-16, 16th Nanoscience and Nanotechnology Conference, Ankara, Türkiye, 2022, Accessed: 00, 2023. [Online]. Available: https://nanotr.meetinghand.net/en/.
