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Spin-on Dopant Based Fabrication Methodology of Integrated Photonic Devices
Date
2024-01-01
Author
Şahin, Alper
Akdeniz, Onur
Kocaman, Serdar
Metadata
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Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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Sparse schedules associated with ion implantation impede the development of active optical devices. This study presents a process based on spin-on dopants that allows in-house fabrication of active devices.
URI
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85205096124&origin=inward
https://hdl.handle.net/11511/111905
Conference Name
CLEO: Science and Innovations in CLEO 2024, CLEO: S and I 2024 - Part of Conference on Lasers and Electro-Optics
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Department of Electrical and Electronics Engineering, Conference / Seminar
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BibTeX
A. Şahin, O. Akdeniz, and S. Kocaman, “Spin-on Dopant Based Fabrication Methodology of Integrated Photonic Devices,” presented at the CLEO: Science and Innovations in CLEO 2024, CLEO: S and I 2024 - Part of Conference on Lasers and Electro-Optics, North Carolina, Amerika Birleşik Devletleri, 2024, Accessed: 00, 2024. [Online]. Available: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85205096124&origin=inward.
