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Multilayer integrated acoustofluidic device for multistage particle manipulation
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Multilayer integrated acoustofluidic.pdf
Date
2025-07-31
Author
Açıkgöz, Hande N
Atay, Atakan
Karaman, Alara
Özer, Mehmet Bülent
Çetin, Barbaros
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In this study, we present a multilayer integrated acoustofluidic device for multistage microparticle manipulation, which combines acoustic size-based separation and enrichment within a compact architecture. The device is composed of two layers, each equipped with independent piezoelectric actuators operating at distinct resonance frequencies. The top layer enables the separation of 2 µm and 12 µm fluorescent particles, while the bottom layer enhances the concentration of 2 µm particles. A thin polymer layer is used to acoustically isolate the units, allowing concurrent manipulation without any acoustic interference. The performance of the isolated units as well as the integrated device was experimentally assessed under varying flow conditions, demonstrating high-efficiency separation and tunable enrichment ratios. This multilayer platform provides a scalable and efficient solution for complex bioanalytical applications requiring sequential acoustofluidic operations in a miniaturized format.
Subject Keywords
acoustofluidics
,
enrichment
,
integrated device
,
particle separation
URI
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=105009953784&origin=inward
https://hdl.handle.net/11511/115238
Journal
Journal of Micromechanics and Microengineering
DOI
https://doi.org/10.1088/1361-6439/ade889
Collections
Department of Mechanical Engineering, Article
Citation Formats
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BibTeX
H. N. Açıkgöz, A. Atay, A. Karaman, M. B. Özer, and B. Çetin, “Multilayer integrated acoustofluidic device for multistage particle manipulation,”
Journal of Micromechanics and Microengineering
, vol. 35, no. 7, pp. 0–0, 2025, Accessed: 00, 2025. [Online]. Available: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=105009953784&origin=inward.