Humidity sensors using MEMS and standard CMOS technologies

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2003
Okcan, Burak
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Humidity, Hygrometry., Dielectric films
https://hdl.handle.net/11511/13835
Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats
B. Okcan, “Humidity sensors using MEMS and standard CMOS technologies,” M.S. - Master of Science, Middle East Technical University, 2003.
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