The admittance analysis of the pecvd deposited silicon nitride thin films

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1998
Muşabak, Selma
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https://hdl.handle.net/11511/1404
Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats
S. Muşabak, “The admittance analysis of the pecvd deposited silicon nitride thin films,” Middle East Technical University, 1998.
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