Modeling and control of high temperature oven for low temperature co-fired ceramic (LTCC) device manufacturing

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2012

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Yücel, Ayşe Tuğçe

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In the electronics the quality, reliability, operational speed, device density and cost of circuits are fundamentally determined by carriers. If it is necessary to use better material than plastic carrier, it has to be made of ceramics or glass-ceramics. This study dealt with the ceramic based carrier production system. The types of the raw ceramics fired at low temperature (below 1000°C) are called Low Temperature Co-Fired Ceramics (LTCC). In this study, a comprehensive thermal model is described for the high temperature oven which belongs to a Low Temperature Co-fired Ceramic (LTCC) substance production line. The model includes detailed energy balances with conduction, convection and radiation heat transfer mechanisms, view factor derivations for the radiative terms, thermocouple balances, heating filaments and cooling mechanisms for the system. Research was conducted mainly on process development and production conditions along with the system modeling of oven. Temperature control was made in high temperature co-firing oven. Radiation View Factors for substrate and thermocouples are determined. View factors between substrate and top-bottom-sides of the oven are calculated, and then inserted into the energy balances. The same arrangement was made for 3 thermocouples at the bottom of the oven. Combination of both expressions gave the final model. Modeling studies were held with energy balance simulations on MATLAB. Data analysis and DOE study were held with JMP Software

Subject Keywords

Ceramics., Ceramic materials., Electronic ceramics., Low Temperature Cofired Ceramic technology.

URI

http://etd.lib.metu.edu.tr/upload/12614918/index.pdf
https://hdl.handle.net/11511/21814

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Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats

A. T. Yücel, “Modeling and control of high temperature oven for low temperature co-fired ceramic (LTCC) device manufacturing,” M.S. - Master of Science, Middle East Technical University, 2012.