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Synthesis of silicon-germanium by high dose germanium ion implantation into silicon
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082759.pdf
Date
1999
Author
Şahin, Mehmet
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https://hdl.handle.net/11511/2206
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Graduate School of Natural and Applied Sciences, Thesis
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M. Şahin, “Synthesis of silicon-germanium by high dose germanium ion implantation into silicon,” Middle East Technical University, 1999.