Synthesis of silicon-germanium by high dose germanium ion implantation into silicon

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1999
Şahin, Mehmet
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https://hdl.handle.net/11511/2206
Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats
M. Şahin, “Synthesis of silicon-germanium by high dose germanium ion implantation into silicon,” Middle East Technical University, 1999.
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