Aygen Savaş

E-mail

aygen@metu.edu.tr

Department

Department of Chemical Engineering

ORCID

0000-0001-7676-2333

Solvent recovery from photolithography wastes using cellulose ultrafiltration membranes Savaş, Aygen; Çulfaz Emecen, Pınar Zeynep (2022-04-05) Solvent recycling and reuse are indispensable for ensuring a sustainable chemical industry and circular economy. In this study we report the fabrication of cellulose ultrafiltration membranes and their application in recov...
Cellulose ultrafiltration membranes for cleaning solvent wastes of photolithography process Savaş, Aygen; Çulfaz Emecen, Pınar Zeynep (2020-12-07) Photolithography, the process used to transfer shapes and patterns on semiconductors, uses a number of solvents such as acetone, n-methyl pyrrolidone and propylene glycol monomethyl ether acetate (PGMEA), to clean...

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