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Fırat İdikut

E-mail
idikut@metu.edu.tr
Department
Department of Physics
Scopus Author ID
Subsurface Silicon Processing by Microsphere Focusing of Ultrafast Infrared Laser
İdikut, Fırat; Borra, M. Zolfaghari; Seyedpour, S. Esmaeilzad; Bek, Alpan (2019-01-01)
Attention on applications of femtosecond lasers in semiconductor materials processing is ever growing. There has been an increasing research momentum especially towards multi-photon absorption based silicon (Si) processing...