Effect of gamma-radiation on HfO2 based MOS capacitor

Date

2010-05-01

Author

Ergin, F. Belgin
Turan, Raşit
Shishiyanu, Sergiu T.
YILMAZ, ERCAN

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

44
views

0
downloads

Radiation effects on Metal Oxide Semiconductor (MOS) capacitors with a HfO2 gate insulator have been studied. Because HfO2 is a promising high-k dielectric material for microelectronic applications, radiation effects on its performance in MOS devices is of interest. New results on radiation effects on HfO2, particularly at low gamma radiation doses, are presented. The results are compared with other systems including those of Al2O3 plus silicon based Si MOS capacitors. Both devices with different gate thicknesses were irradiated with Co-60 gamma source for varying exposure time. The midgap and flatband voltage shifts in these devices were measured and analyzed. Results show that gamma radiation does not cause significant variations in the HfO2 MOS especially at low doses.

URI

https://hdl.handle.net/11511/36250

Journal

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

DOI

https://doi.org/10.1016/j.nimb.2010.01.027

Collections

Department of Physics, Article

Suggestions

OpenMETU
Core

Effect of Implanted Phosphorus Profile on iVoc Variations During Firing Process of n-type Silicon Bektaş, Gence; Çiftpınar, Emine Hande; Bütüner, Sümeyye Koçak; Keçeci, Ahmet Emin; Canar, Hasan Hüseyin; Kökbudak, Gamze; Asav, Hasan; Turan, Raşit (2022-08-24) Electrical activation of implanted phosphorus can be carried out simultaneously with boron dopants at high temperatures or separately at lower temperatures. In this study, we investigate the effect of high and low-temperature annealing processes for dopant activation following the phosphorous implantation process in n-type c-Si. Symmetrically implanted wafers are activated at 875 °C (low temperature) and 1050 °C (high temperature) and subsequently coated with PEC VD SiNx:H. iVoc values of the samples activa...
Effect of High-Density Nanoparticles on Recrystallization and Texture Evolution in Ferritic Alloys Aydoğan Güngör, Eda; Carvajal-Nunez, Ursula; Vogel, Sven C.; Li, Meimei; Maloy, Stuart A. (MDPI AG, 2019-03-01) Ferritic alloys are important for nuclear reactor applications due to their microstructural stability, corrosion resistance, and favorable mechanical properties. Nanostructured ferritic alloys having a high density of Y-Ti-O rich nano-oxides (NOs < 5 nm) are found to be extremely stable at high temperatures up to similar to 1100 degrees C. This study serves to understand the effect of a high density of nano-particles on texture evolution and recrystallization mechanisms in ferritic alloys of 14YWT (14Cr-3W-...
Effect of expandable graphite on flame retardant, thermal and mechanical properties of thermoplastic polyurethane composites filled with huntite&hydromagnesite mineral Guler, Turkan; Tayfun, Umit; Bayramlı, Erdal; DOĞAN, Mehmet (2017-01-10) The effect of expandable graphite (EG) was studied on the flame retardant, thermal and mechanical properties of thermoplastic polyurethane (TPU) containing huntite&hydromagnesite (HH). According to the flammability tests results, the synergistic interaction was observed between HH and EG. The maximum limiting oxygen index (LOI value was observed at a ratio of 1:1 (HH:EG) and the highest vertical burning test (UL-94) rating of V0 was observed at a ratios of 4:1, 3:2 and 1:1. The synergistic interaction betwe...
Effect of High Temperature on Swellable Organically Modified Silica (SOMS) and Its Application for Preferential CO Oxidation in H-2 Rich Environment Basu, Dishari; Ailawar, Saurabh; Çelik, Gökhan; Edmiston, Paul; Ozkan, Umit S. (Wiley, 2020-07-01) Transition metal oxide catalysts tend to deactivate in the presence of moisture during hydrogen purification using preferential oxidation (PROX) of carbon monoxide (CO) . Thus, novel water-tolerant catalysts need to be developed. Herein, the evolution of heat treated swellable organically-modified silica (SOMS), a hydrophobic organic-inorganic hybrid material, has been characterized and applied as a catalyst support for PROX under moisture-rich conditions. While the SOMS-supported cobalt manganese oxide was...
EFFECT OF ELECTRON AND GAMMA-RAY IRRADIATION ON THE CHEMICAL-COMPOSITION AND ATOMIC DISTRIBUTION OF COPPER-BASED AND IRON-BASED ALLOYS BINNATOV, KG; RODIONOV, YL; Mehrabov, Amdulla; ALIZADE, II (1990-01-01) This paper reports that the oxygen, hydrogen, carbon, nitrogen, and sulfur contents of steels and alloys can vary as a result of irradiation by electrons and gamma rays at comparatively low temperatures. As this takes place, the materials can be either saturated with these elements, or these elements can be removed from the irradiated materials, depending on the irradiation medium. Transformations are initiated as a result of radiation-stimulated oxygenation of copper-iron, iron-manganese, and iron-nickel a...

Citation Formats

F. B. Ergin, R. Turan, S. T. Shishiyanu, and E. YILMAZ, “Effect of gamma-radiation on HfO2 based MOS capacitor,” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, pp. 1482–1485, 2010, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/36250.