A RESONANT TUNING FORK FORCE SENSOR WITH UNPRECEDENTED COMBINATION OF RESOLUTION AND RANGE

2011-01-27
Azgın, Kıvanç
Ro, C.
Torrents, A.
Akın, Tayfun
Valdevit, L.
This paper presents a double-ended tuning fork (DETF) force sensor with a resolution of 7nN and a range of 0.12N. The resonator has a scale factor of 216 kHz/N, a Q-factor exceeding 60,000 at 3mTorr ambient pressure and a zero-load resonant frequency of 47.6 kHz. The sensor and the complete readout circuit are fully embedded in a compact 65 mm x 52 mm printed circuit board (PCB). The PCB is mounted on a micro-stage and coupled with an off-the-shelf displacement actuator to realize an economical, versatile and robust micro mechanical test frame with unprecedented combination of force and displacement resolutions and ranges.
Citation Formats
K. Azgın, C. Ro, A. Torrents, T. Akın, and L. Valdevit, “A RESONANT TUNING FORK FORCE SENSOR WITH UNPRECEDENTED COMBINATION OF RESOLUTION AND RANGE,” 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/36316.