A RESONANT TUNING FORK FORCE SENSOR WITH UNPRECEDENTED COMBINATION OF RESOLUTION AND RANGE

Date

2011-01-27

Author

Azgın, Kıvanç
Torrents, A.
Akın, Tayfun

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This paper presents a double-ended tuning fork (DETF) force sensor with a resolution of 7nN and a range of 0.12N. The resonator has a scale factor of 216 kHz/N, a Q-factor exceeding 60,000 at 3mTorr ambient pressure and a zero-load resonant frequency of 47.6 kHz. The sensor and the complete readout circuit are fully embedded in a compact 65 mm x 52 mm printed circuit board (PCB). The PCB is mounted on a micro-stage and coupled with an off-the-shelf displacement actuator to realize an economical, versatile and robust micro mechanical test frame with unprecedented combination of force and displacement resolutions and ranges.

URI

https://hdl.handle.net/11511/36316

DOI

https://doi.org/10.1109/memsys.2011.5734482

Collections

Department of Mechanical Engineering, Conference / Seminar

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Citation Formats

K. Azgın, A. Torrents, and T. Akın, “A RESONANT TUNING FORK FORCE SENSOR WITH UNPRECEDENTED COMBINATION OF RESOLUTION AND RANGE,” 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/36316.