A fourth order unconstrained ∑Δ capacitive accelerometer

Date

2011-06-09

Author

Sonmez, Uǧur
Külah, Haluk
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

84
views

0
downloads

This paper reports the implementation of a high resolution and high dynamic range ΣΔ capacitive accelerometer for navigation applications. Designed system can achieve up to ± 40g full scale range, 131.9 dB dynamic range at 1 Hz, minimum noise floor of 6 μg/√Hz, and bias instability of 6.4μg. Flexible architecture combines the advantages of 2 nd and 4 th order ΣΔ modulators into a high performance design eliminating the stability dependence of high order accelerometers on fabrication variations. Due to high voltage pulse feedback technique and safe high order modulation; the designed accelerometer system achieves a respectable dynamic range without significantly increasing process, circuit or integration complexity.

Subject Keywords

Quantization, Dynamic range, Sensors, Circuit stability, Modulation, Noise, Accelerometers

URI

https://hdl.handle.net/11511/37491

DOI

https://doi.org/10.1109/transducers.2011.5969214

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

Precision readout circuits for capacitive microaccelerometers Yazdi, N; Külah, Haluk; Najafi, K (2004-01-01) This paper presents a review of capacitive readout front-end circuits for high-precision accelerometers. The primary design parameters and the trade-offs affecting the resolution are presented. The discussions apply to all capacitive microsensor interfaces. Also a high-sensitivity capacitive accelerometer interface circuit for hybrid-integration with a surface/bulk micromachined micro-g accelerometer is described [7, 10]. The first generation of the circuit resolves 75aF of capacitance on similar to 120pF p...
A CMOS switched-capacitor interface circuit for an integrated accelerometer Külah, Haluk; Najafi, K (2000-01-01) This paper presents a CMOS interface electronics for monolithic micromachined capacitive accelerometer systems. The interface electronics is a fully differential switched-capacitor charge integrator with its internal clock generator and sensor feedback circuit for closed-loop operation. The circuit is designed for open-loop and closed-loop operations, and provides both digital and differential analog outputs. One of the main advantages of this chip is that it can be monolithically integrated with the sensor...
A Sigma Delta micro accelerometer with 6 mu g/root Hz resolution and 130 dB dynamic range Sonmez, Ugur; Külah, Haluk; Akın, Tayfun (2014-11-01) This paper reports the implementation of a low noise, high dynamic-range I I" pound readout for low cost capacitive Micro-Electro-Mechanical Systems (MEMS) accelerometers. The readout circuit sets the bandwidth of the I I" pound loop through an extra feedback path, and hence allows the closed loop system to operate with the low noise characteristics similar to a second-order I I" pound analog-to-digital converter. A thorough noise analysis of the proposed accelerometer shows that the mechanical noise is the...
A Capacitive MEMS Accelerometer Readout with Concurrent Detection and Feedback Using Discrete Components Terzioglu, Yunus; Alper, Said Emre; Azgın, Kıvanç; Akın, Tayfun (2014-05-08) This paper presents an analog readout method for capacitive MEMS accelerometers in which the feedback actuation and capacitive detection are achieved simultaneously on the same electrode set. The presented circuit operates in closed-loop for improved linearity, and it is constructed in a hybrid platform package in which off-the-shelf discrete components are used together with the silicon-on-glass micro-accelerometer. The system is developed as a practical solution to reduce the complexity of the readout cir...
A CMOS visible image sensor array using current mirroring integration readout circuitry Akbay, Selim Sermet; Bircan, A.; Akın, Tayfun (null; 2000-08-30) This paper reports the development of a CMOS visible sensor array using a high performance readout circuit called Current Mirroring Integration (CMI). The sensor element is a photodiode implemented using n-well and p+ -active layers available in any CMOS process. The current generated by optical excitation is mirrored and integrated in an off-pixel capacitor using the CMI readout circuit, which provides high injection efficiency, low input impedance, almost-zero and stable detector bias, and a high dynamic ...

Citation Formats

U. Sonmez, H. Külah, and T. Akın, “A fourth order unconstrained ∑Δ capacitive accelerometer,” 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/37491.