LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE

Date

2017-12-01

Author

Azgın, Kıvanç

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Bu çalışmada titreşim genliği ölçümü ile çalışan Lorentz kuvveti tabanlı ve algılayıcısı tınlaşan MEMS yük hücresi olan bir manyetometre sunulmaktadır. Manyetometre, tarak elektrotlara sahip Çift Bağlı Diyapazon (ÇBD) bir tınlatıcı ile, uçlarından ve ortalarından birbirlerine bağlanmış kirişlerden oluşan bir ızgara yapısından oluşmaktadır. Izgara yapısı, üzerinden geçen akımla Lorentz kuvvetini oluştururken, elektriksel direncin ve yapının sıcaklığının yükselmesini engellemektedir. Maksimum hassasiyet için yapının genlik frekans tepkisinin eğiminin en büyük olduğu tahrik frekansı seçilmiştir. Manyetometre standart SOI (Yalıtkan-Üzeri-Silisyum) mikro-işleme teknikleri kullanılarak 35µm yapısal kalınlıkla üretilmiştir. Yapılan frekans tepkisi testinde ÇBD yapısının tınlaşım frekansının 63812,1 Hz ve 0,2 mTorr'daki kalite faktörünün de 5950 olduğu belirlenmiştir. Testler yapıya dik olarak oluşturulan 30mT manyetik alan altında, 100mA ızgara akımı ve 70mV tahrik genliği ile yapılmıştır. Manyetometrenin orantı katsayısı 113.7 mV/T ve duyarlılığı 965 µT/Hz½ olarak ölçülmüştür.

Subject Keywords

Magnetometer, DETF, MEMS, Lorentz Force, Amplitude Detection, Manyetometre, ÇBD (Çift Bağlı Diyapazon), MEMS, Lorentz Kuvveti, Genlik Ölçüm

URI

https://hdl.handle.net/11511/40169

Journal

Uludağ University Journal of The Faculty of Engineering

DOI

https://doi.org/10.17482/uumfd.325923

Collections

Department of Mechanical Engineering, Article

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Citation Formats

K. Azgın, “LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE,” Uludağ University Journal of The Faculty of Engineering, pp. 61–80, 2017, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/40169.