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Laser-slicing of silicon with 3D nonlinear laser lithography
Date
2017-06-29
Author
TOKEL, ONUR
Turnali, Ahmet
Colakoglu, Tahir
Ilday, Serim
Borra, Mona Zolfaghari
Pavlov, Ihor
Bek, Alpan
Turan, Raşit
İLDAY, Fatih Ömer
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Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.
URI
https://hdl.handle.net/11511/55086
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Department of Physics, Conference / Seminar
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O. TOKEL et al., “Laser-slicing of silicon with 3D nonlinear laser lithography,” 2017, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/55086.