An in plane high sensitivity low noise micro g silicon accelerometer

An in-plane high-sensitivity, low-noise micro-g silicon accelerometer with CMOS readout circuitry Chae, J; Külah, Haluk; Najafi, K (Institute of Electrical and Electronics Engineers (IEEE), 2004-08-01) A high-sensitivity, low-noise in-plane (lateral) capacitive silicon microaccelerometer utilizing a combined surface and bulk micromachining technology is reported. The accelerometer utilizes a 0.5-mm-thick, 2.4 x 1.0 mm(2) proof-mass and high aspect-ratio vertical polysilicon sensing electrodes fabricated using a trench refill process. The electrodes are separated from the proof-mass by a 1.1-mum sensing gap formed using a sacrificial oxide layer. The measured device sensitivity is 5.6 pF/g. A CMOS readout ...
AN INTERFERENCE AND BEAM SQUINT AWARE HYBRID MASSIVE MIMO FOR SPATIAL WIDEBAND BDMA CHANNELS Özen, Hakan; Güvensen, Gökhan Muzaffer; Department of Electrical and Electronics Engineering (2022-2-10) This study investigates interference and beam squint aware analog beamformer design for massive multiple-input multiple-output (MIMO) systems for spatial wideband beam division multiple access (BDMA) channels. Single carrier frequency domain equalization (SC-FDE) is employed in uplink frequency selective channels. We first design interference and beam squint aware (BSA) narrowband generalized eigenbeamformer (BSA NB GEB) based on a phase shifter (PS) network using slowly varying long-term channel statistics...
A Phase Coherent 7-bit Digital Step Attenuator on 0.18 mu m SOI Jarihani, Arash Ebrahimi; Kocer, Fatih (2017-10-10) We present a novel digital step attenuator (DSA) with low phase variation under attenuation state and frequency changes. This is achieved while keeping all other specifications comparable with the state-of-the-art. To compensate the phase shift, a number of switchable phase compensating blocks are employed. Unlike previous studies, this work achieves very low phase variation in a commercial, 4x4 quad-flat no-leads (QFN) package, where wirebond effects are significant. The proposed attenuator has 7-bit contr...
An Ultimate Capacitive MEMS Vertical Accelerometer with Differential Sensing Capability Aydemir, Akın; Akın, Tayfun (2015-09-23)
A Capacitive MEMS Accelerometer Readout with Concurrent Detection and Feedback Using Discrete Components Terzioglu, Yunus; Alper, Said Emre; Azgın, Kıvanç; Akın, Tayfun (2014-05-08) This paper presents an analog readout method for capacitive MEMS accelerometers in which the feedback actuation and capacitive detection are achieved simultaneously on the same electrode set. The presented circuit operates in closed-loop for improved linearity, and it is constructed in a hybrid platform package in which off-the-shelf discrete components are used together with the silicon-on-glass micro-accelerometer. The system is developed as a practical solution to reduce the complexity of the readout cir...

Citation Formats

C. Junseok, H. Külah, and K. Najafi, “An in plane high sensitivity low noise micro g silicon accelerometer,” 2003, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/69384.