A Single Mass Self Resonating Closed Loop Capacitive MEMS Accelerometer

Date

2016-11-01

Author

Köse, Talha
Terzioğlu, Yunus
Azgın, Kıvanç
Akın, Tayfun

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https://hdl.handle.net/11511/73271

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A three axis capacitive MEMS accelerometer on a single substrate Aydemir, Akın; Akın, Tayfun (EPO, 2017) The invention relates to a three axis capacitive mems accelerometer on a single substrate. In this invention a varying gap differential capacitive sensing three-axis accelerometer using SOI on glass process is introduced. The out of plane axis accelerometer which is developed in the present invention can be used for fabrication of either a three axis accelerometer with a single proof mass or an individual single axis accelerometers on the same substrate. Additionally the out of plane axis accelerometer whic...
A Capacitive MEMS Accelerometer Readout with Concurrent Detection and Feedback Using Discrete Components Terzioglu, Yunus; Alper, Said Emre; Azgın, Kıvanç; Akın, Tayfun (2014-05-08) This paper presents an analog readout method for capacitive MEMS accelerometers in which the feedback actuation and capacitive detection are achieved simultaneously on the same electrode set. The presented circuit operates in closed-loop for improved linearity, and it is constructed in a hybrid platform package in which off-the-shelf discrete components are used together with the silicon-on-glass micro-accelerometer. The system is developed as a practical solution to reduce the complexity of the readout cir...
A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die TEZ, SERDAR; Aykutlu, Ulas; Torunbalci, Mustafa Mert; Akın, Tayfun (2015-10-01) This paper presents a high-performance three-axis capacitive microelectromechanical system (MEMS) accelerometer implemented by fabricating individual lateral and vertical differential accelerometers in the same die. The fabrication process is based on the formation of a glass-silicon-glass multi-stack. First, a 35-mu m thick < 111 > silicon structural layer of an Silicon-On-Insulator (SOI) wafer is patterned with deep reactive ion etching (DRIE) and attached on a base glass substrate with anodic bonding, wh...
A single mass two-axis capacitive MEMS accelerometer with force rebalance Köse, Talha; Terzioʇlu, Yunus; Azgın, Kıvanç; Akın, Tayfun (2015-03-26) This paper presents a single mass 2-axis MEMS capacitive accelerometer with a unique force rebalance method achieved with the readout circuit developed for the simultaneous 2-axis acceleration sensing. Using a single mass structure with extra fingers for reading multiple axes allows better sensor performances when compared to multi-axis accelerometers with individual proof masses occupying the same die area. Test results show 274 mV/g scale factor for x-axis, and 280 mV/g scale factor for y-axis, while the ...

Citation Formats

T. Köse, Y. Terzioğlu, K. Azgın, and T. Akın, “A Single Mass Self Resonating Closed Loop Capacitive MEMS Accelerometer,” 2016, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/73271.