An Ultimate Capacitive MEMS Vertical Accelerometer with Differential Sensing Capability

2015-09-23
Aydemir, Akın
Akın, Tayfun
Citation Formats
A. Aydemir and T. Akın, “An Ultimate Capacitive MEMS Vertical Accelerometer with Differential Sensing Capability,” presented at the The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15) (2015), 2015, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/74048.