An Ultimate Capacitive MEMS Vertical Accelerometer with Differential Sensing Capability

Date

2015-09-23

Author

Aydemir, Akın
Akın, Tayfun

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URI

https://hdl.handle.net/11511/74048

Conference Name

The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15) (2015)

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

A. Aydemir and T. Akın, “An Ultimate Capacitive MEMS Vertical Accelerometer with Differential Sensing Capability,” presented at the The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15) (2015), 2015, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/74048.