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Endüstriyel ve Biyomedikal Uygulamaları için Silisyum Mikroişlenmiş Kapasitif Basınç Sensörü
Date
1997-08-31
Author
Akar, Orhan
Akın, Tayfun
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This paper reports the design and fabrication of two type of micromachined capacitıve silicon pressure sensors for industrial and biomedical applications. The dynamic ranges of the sensors designed for industrial applications vary between 0- 50mmHg and 0-1200mmHg. Sensors are batch fabricated usıng silicon micromachıning process and occupies an area of 0.4 x 0.6mm . We have measured 120fF capacitance changes for 0- 200mmHg range över 500fF zero pressure capacitance. The pressure sensor for biomedical applications can be implented in the body and can be monitored telemetrically without using any wire that breaks the skin. This is achieved by using the electroplated coil which is fabricated together with the pressure sensor. This implantable sensor measures 1 5mm x 2.5mm x O.ömm in size and provides a dynamic range of OSOmmHg.
URI
https://hdl.handle.net/11511/75150
https://www.emo.org.tr/ekler/22fdae1ac11438b_ek.pdf
Conference Name
7. Ulusal Kongresi, Türkiye, (31 Ağustos - 06 Eylül 1997)
Collections
Department of Electrical and Electronics Engineering, Conference / Seminar
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O. Akar and T. Akın, “Endüstriyel ve Biyomedikal Uygulamaları için Silisyum Mikroişlenmiş Kapasitif Basınç Sensörü,” presented at the 7. Ulusal Kongresi, Türkiye, (31 Ağustos - 06 Eylül 1997), Ankara, Türkiye, 1997, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/75150.
