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Development of High Speed AFM Operating at 1,000 Lines/s amp 15x15x3µm XYZ Scan Range
Date
2017-12-01
Author
Çelik, Ümit
Kehribar, İhsan
Uysallı, Yiğit
Çelik, Kübra
Özer, Hakan Özgür
Oral, Ahmet
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https://mrsfall.zerista.com/event/member/427875
https://hdl.handle.net/11511/77241
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Development of High Speed AFM operating at 1,000 Lines/s 15x15x3µm XYZ Scan Area
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Development of SAMPLE Scanning High Speed AFM operating at 1,000 Lines/s 15µm x 15µm x 3µm
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High speed atomic force microscope allows imaging dynamic processes on the surfaces. We have developed a very high speed tip scanning atomic force microscope (HS-AFM). We designed the tip scanning system to overcome the sample size limits, with a beam tracking capability to follow the cantilever motion. A high resonance frequency flexure scanner developed which has 15m scan range in XY and 3m in Z axis. A novel FPGA based high speed scanning and data acquisition system was developed. The scanner is driven b...
Development of high fill factor and high performance uncooled infrared detector pixels
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This thesis presents the design, fabrication and characterization of high performance and high fill factor surface micromachined uncooled infrared resistive microbolometer detectors which can be used in large format focal plane arrays (FPAs). The detector pixels, which have a pixel pitch of 25 μm, are designed and fabricated as two-level structures using the enhanced sandwich type resistor while the active material is selected as Yttrium Barium Copper Oxide (YBCO). First level of the pixel structure is allo...
DEVELOPMENT OF SMALL SIZE UNCOOLED INFRARED MICROBOLOMETER PIXEL
Tekin, Baran utku; Akın, Tayfun; Turan, Raşit; Department of Micro and Nanotechnology (2021-9)
This thesis reports the development of 12 µm pixel pitch single layer microbolometer structures for use in the 8-12 µm wavelength regions, following recent trends in the last decade in microbolometers. Various pixel structures are designed, simulated, fabricated, and characterized to obtain acceptable detector performance in these small pixels. The pixel structures are improved by reducing the pixel thermal conductance and by using planar type electrode structures where the active material is selected as V...
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Ü. Çelik, İ. Kehribar, Y. Uysallı, K. Çelik, H. Ö. Özer, and A. Oral, “Development of High Speed AFM Operating at 1,000 Lines/s amp 15x15x3µm XYZ Scan Range,” 2017, Accessed: 00, 2021. [Online]. Available: https://mrsfall.zerista.com/event/member/427875.