A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

Date

2002-01-01

Author

Chae, Junseok
Külah, Haluk
Najafi, Khalil

Metadata

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A hybrid micro-accelerometer system consisting of a new bulk Silicon-On-Glass (SOG) lateral capacitive microaccelerometer and a CMOS interface circuit is presented. The accelerometer has a 120mum-thick proof mass, 2.2mm x 3.0mm in size with 3.2mum sensing gap defined by DRIE. The circuit has a 95dB dynamic range, a low offset of 370muV and can resolve better than 75aF. The hybrid system has a measured sensitivity of 40mV/g and resolution of 100mug/rootHz.

Subject Keywords

Inertial sensors, Mu a accelerometer, Sigma-delta

URI

https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=0036124337&origin=inward
https://hdl.handle.net/11511/77430

Conference Name

IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, (20 - 24 Ocak 2002)

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

J. Chae, H. Külah, and K. Najafi, “A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry,” Las Vegas, NV, Amerika Birleşik Devletleri, 2002, p. 623, Accessed: 00, 2021. [Online]. Available: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=0036124337&origin=inward.