Mechanism of CVD of Boron by Hydrogen Reduction of BCl3

1998-09-16
Sezgi, Naime Aslı
Hö, Ozbelge
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https://hdl.handle.net/11511/80905
Unverified, Conference / Seminar

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Citation Formats
N. A. Sezgi and O. Hö, “Mechanism of CVD of Boron by Hydrogen Reduction of BCl3,” 1998, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/80905.
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