Metal to metal and capacitive contact RF MEMS shunt switch structures

2006-06-27
Atasoy, Halil İbrahim
Topallı, Kağan
Ünlü, Mehmet
İstanbulluoğlu, İpek
Temoçin, Engin Ufuk
Bayraktar, Ömer
Demir, Şimşek
Aydın Çivi, Hatice Özlem
Koç, Seyit Sencer
Akın, Tayfun

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Citation Formats
H. İ. Atasoy et al., “Metal to metal and capacitive contact RF MEMS shunt switch structures,” 2006, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/84783.