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Tuning structural, electrical, and THz optical properties of VxOy films with W-doping
Date
2022-05-01
Author
Atik, Bahar
Dirican, Emrah
Demirors, Oytun
Altan, Hakan
Esentürk, Okan
Yildirim, Mustafa
Akın, Tayfun
Metadata
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Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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Vanadium oxide plays a crucial role as the temperature-sensitive layer of microbolometers. This layer should possess a high temperature coefficient of resistance (TCR) along with a desirable resistivity suitable for readout electronics. Mixed phase vanadium oxide thin films (VxOy) consist of different ratios of pure phases, which affect the resultant resistivity and TCR. It is thus important to be able to control individual phase concentrations to obtain the desired resistivity and TCR. In this study, we show that W-doping does not only introduce a new W-phase but also supports the formation of new V-phases in addition to the change in relative ratios of the original phases. The new V-phase, V2O5, dominates the overall electrical properties. Here, we first present the formation of new phases with W-doping and the structural and electrical characterization with classical tools, and then we show that Terahertz Time-Domain Spectroscopy (THz-TDS) is a strong nondestructive characterization technique that can monitor these effects of doping especially on the electrical behavior of VxOy films. Exploration of the control of this behavior is essential for the fabrication of a high TCR film with a desirable resistivity.
Subject Keywords
Vanadium oxide
,
Tungsten doping
,
High TCR
,
Non-contact characterization
,
THz spectroscopy
,
Microbolometer
,
DOPED VANADIUM-OXIDE
,
THIN-FILMS
,
THERMOCHROMIC PROPERTIES
,
XPS
,
OXIDATION
,
VO2
,
CONDUCTIVITY
,
REDUCTION
,
ENERGIES
,
METAL
URI
https://hdl.handle.net/11511/95996
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
DOI
https://doi.org/10.1016/j.jallcom.2022.163922
Collections
Department of Physics, Article
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BibTeX
B. Atik et al., “Tuning structural, electrical, and THz optical properties of VxOy films with W-doping,”
JOURNAL OF ALLOYS AND COMPOUNDS
, vol. 903, pp. 0–0, 2022, Accessed: 00, 2022. [Online]. Available: https://hdl.handle.net/11511/95996.