LOW-POWER LOW-NOISE HIGHLY PROGRAMMABLE DIGITAL ACCELEROMETER READOUT FOR HIGH PERFORMANCE MEMS ACCELEROMETERS

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2022-8-11

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Engin, Berk

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This thesis presents a low-power low-noise mixed-signal CMOS readout integrated circuit for high performance MEMS capacitive accelerometers that can both operate in open-loop and closed-loop configurations, which is determined by the external electronics and the system. The system and circuit allow the adjustment of the loop dynamics to achieve low-noise and high order linearity for a very wide range of MEMS capacitive accelerometer sensors. In addition, the system allows the real-time input acceleration range selection in exchange with the lowest signal resolution. The integrated circuit provides highly programmable features for timing and biasing in addition with optional external timing signaling and biasing. The CMOS integrated circuit consists of analog front-end circuit, programmable gain amplifier, Zoom Analog to Digital Converter (ADC) which is combination of Successive Approximation Register (SAR) ADC and Delta-Sigma modulator with auxiliary blocks digital controller, bias generator, and output serializer. The implementation of the readout circuit is done using a 0.35 μm high-voltage CMOS process. Integrated Circuit (IC) components are designed and simulated using Cadence and MATLAB environment to satisfy all the mixed signal system requirements for the readout system, including the detailed analysis of noise performance and linearity with the associated simulation models that are constructed corresponding analytic equations. The system performance simulations are conducted for a sample MEMS capacitive accelerometer sensor with specifications 3.5 pF rest capacitance, 5.4kHz resonant frequency, a quality factor of 9.6, and a 3μg/√Hz Brownian noise level. According to system level simulation results, the system with the CMOS integrated circuit achieves 3.5 μg/√Hz Brownian noise level in ±20g full scale range, which is the lowest noise level achieved at METU. The designed CMOS integrated circuit measures 4.3mmx2.25mm, operates from a 3.3V supply voltage, and dissipates 4 mW.

Subject Keywords

Mixed signal readout system, Low noise IC, Configurable loop accelerometer, Zoom ADC, Sigma-delta modulator

URI

https://hdl.handle.net/11511/98678

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Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats

B. Engin, “LOW-POWER LOW-NOISE HIGHLY PROGRAMMABLE DIGITAL ACCELEROMETER READOUT FOR HIGH PERFORMANCE MEMS ACCELEROMETERS,” M.S. - Master of Science, Middle East Technical University, 2022.