A high sensitivity silicon on glass lateral micro g microaccelerometer

Date

2000-06-04

Author

Chae, J
Külah, Haluk
Salian, A
Najafi, Khalil

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URI

https://hdl.handle.net/11511/77145

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Citation Formats

J. Chae, H. Külah, A. Salian, and K. Najafi, “A high sensitivity silicon on glass lateral micro g microaccelerometer,” 2000, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/77145.