Nanosecond Laser-Induced Micro-Modifications in Bulk of Crystal Silicon

Date

2023-01-01

Author

Kadan, Viktor
Pavlova, Svitlana
Bek, Alpan
Aydin, Yavuz
Blonskyi, Ivan
Pavlov, Ihor

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3D modifications of crystalline Si (c-Si) by nano-, pico-, or femtosecond lasers at 1550 nm-wavelength are under intensive studies nowadays due to the wide range of potential applications in photonics and optoelectronics [1]. Despite numerous amount of publications, the dependency of the modified region properties on processing laser parameters is still not completely clarified. Here we present an experimental study of local micro-modification produced by 1550 nm-wavelength ns-laser pulses in the bulk c-Si for a wide range of energies, durations, repetition rates, and writing speeds.

URI

https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85175737120&origin=inward
https://hdl.handle.net/11511/106208

DOI

https://doi.org/10.1109/cleo/europe-eqec57999.2023.10231359

Conference Name

2023 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2023

Collections

Department of Physics, Conference / Seminar

Citation Formats

V. Kadan, S. Pavlova, A. Bek, Y. Aydin, I. Blonskyi, and I. Pavlov, “Nanosecond Laser-Induced Micro-Modifications in Bulk of Crystal Silicon,” presented at the 2023 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2023, Munich, Almanya, 2023, Accessed: 00, 2023. [Online]. Available: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85175737120&origin=inward.