Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream

Date

2017-02-01

Author

Tanisli, Murat
Rafatov, İsmail
Sahin, Neslihan
Mertadam, Sercan
Demir, Suleyman

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In this study, the characteristic properties and plasma parameters of capacitive radio frequency (RF) argon (Ar) discharge and supplementary discharge at low pressure are investigated with optical emission spectroscopy (OES). The wavelengths of spectral lines from OES are obtained between 650-900 nm. Using OES lines and related experimental data, the electron temperatures for different RF power, flow, and measurement periods are determined. Eventually, the properties of plasma including the electron temperature are identified. In addition, the numerical modelling of the discharge parameters is carried out by using the "extended" fluid model for plasma, and consistency between numerical and experimental results is discussed.

Subject Keywords

General Physics and Astronomy

URI

https://hdl.handle.net/11511/35179

Journal

CANADIAN JOURNAL OF PHYSICS

DOI

https://doi.org/10.1139/cjp-2016-0597

Collections

Department of Physics, Article

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Citation Formats

M. Tanisli, İ. Rafatov, N. Sahin, S. Mertadam, and S. Demir, “Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream,” CANADIAN JOURNAL OF PHYSICS, pp. 190–200, 2017, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/35179.