Thin film thermoelectric energy harvesters for MEMS micropower generation

Date

2010-12-01

Author

Topal, Emre Tan
Külah, Haluk
Muhtaroglu, Ali

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In this study, we propose a novel thin film thermoelectric energy harvester design based on Cr-Ni thermocouples overlayed on top of a suspended parylene diaphragm. The TE energy harvester can be used to harvest excess heat energy generated at the hot spots in a computer platform. The design can be merged with the previously reported EM energy harvester within a MEMS device to scavenge energy from both vibrations and thermals in a hybrid mode of operation. The performance evaluation of the MEMS integrated thin film thermoelectric energy harvester was done through extensive modeling and optimization accomplished by finite element analysis, and an optimization algorithm implemented in MATLAB. Cr-Ni based thermoelectric generator was then compared to the lateral and vertical thermoelectric designs reported in literature. A power density of 12 μW/cm 2 can be obtained using Cr and Nickel as thermopile material when the supplied temperature difference is 50 K. Power levels as high as 140 μW/cm 2 can be reached using n- and p-doped silicon. Thus, this novel topology promises to be an efficient TE harvester with integration of materials with higher Seebeck coefficient like silicon, polysilicon, bismuth to enable hybrid mode operation for specific applications.

Subject Keywords

Heating, Generators, Junctions, Silicon, Micromechanical devices, Fabrication

URI

https://hdl.handle.net/11511/40237

DOI

https://doi.org/10.1109/iceac.2010.5702321

Conference Name

2010 International Conference on Energy Aware Computing

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

E. T. Topal, H. Külah, and A. Muhtaroglu, “Thin film thermoelectric energy harvesters for MEMS micropower generation,” presented at the 2010 International Conference on Energy Aware Computing, Cairo, Egypt, 2010, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/40237.