Optimization of Silicon Nitride (SiN X ) Anti-reflective coating (arc) and passivation layers using industrial plasma enhanced chemical vapor deposition (pecvd) for perc type solar cells

Kökbudak, Gamze
Orhan, Efe
Es, Fırat
Semiz, Emel
Turan, Raşit
This study focuses on optimization of silicon nitride (SiN X ) Anti Reflective Coating (ARC) layer deposited on the front side of industrial Passivated Emitter and Rear Cell (PERC) type solar cells in an industrial tube type plasma enhanced chemical vapor deposition (PECVD) tool. Reflection and thickness optimization studies of ARC layer was carried out through a matrix composed of critical plasma parameters. Characterization of the layers were conducted via ellipsometry and reflectivity measurements for uniform coating with desired thickness and refractive index throughout the boat and within the wafers. Passivation property of our films was also tested through QSSPC lifetime measurements.


Canar, Hasan Hüseyin; Turan, Raşit; Erçelebi, Ayşe Çiğdem; Department of Physics (2022-6)
PECVD deposited SiNx has been used in PV industry especially for PERC solar cell as anti-reflection coating (ARC) and passivating layer [1]. However, its limited optical and electrical properties create a barrier for achieving higher solar cell efficiencies. For that reason, an alternative is introduced that is SiOxNy thin film with adjustable refractive index can be tuned as low as SiO2 [2]. In this thesis, deposited SiNx and SiOxNy films were characterized by various measurement methods such as SE, FTIR,...
Optimization of metalization in crystalline silicon solar cells
Demircioğlu, Olgu; Turan, Raşit; Ünalan, Hüsnü Emrah; Department of Micro and Nanotechnology (2012)
Production steps of crystalline silicon solar cells include several physical and chemical processes like etching, doping, annealing, nitride coating, metallization and firing of the metal contacts. Among these processes, the metallization plays a crucial role in the energy conversion performance of the cell. The quality of the metal layers used on the back and the front surface of the cell and the quality of the electrical contact they form with the underlying substrate have a detrimental effect on the amou...
Development of hole transport transparent conductive electrodes for n-type crystalline silicon solar cells
Akdemir, Ozan; Bek, Alpan; İmer, Muhsine Bilge; Department of Micro and Nanotechnology (2018)
Conventional transparent conductive electrodes (TCEs) used in crystal silicon (c-Si) solar cells are commonly made of indium tin oxide (ITO) which provides low sheet resistance and high transparency. However, due to indium scarcity, ITO layers increase the fabrication cost; thus, alternative TCEs, such as fluorine-doped tin oxide (FTO), zinc oxide (ZnO), metal nanowires and Oxide/Metal/Oxide (OMO) multilayers, are being investigated. Conventional solar cells also make use of doped layers, to create the junc...
Efficient Light Trapping in Inverted Nanopyramid Thin Crystalline Silicon Membranes for Solar Cell Applications
MAVROKEFALOS, Anastassios; HAN, Sang Eon; Yerci, Selçuk; Branham, Matthew S.; CHEN, Gang (2012-06-01)
Thin-film crystalline silicon (c-Si) solar cells with light-trapping structures can enhance light absorption within the semiconductor absorber layer and reduce material usage. Here we demonstrate that an inverted nanopyramid light-trapping scheme for c-Si thin films, fabricated at wafer scale via a low-cost wet etching process, significantly enhances absorption within the c-Si layer. A broadband enhancement in absorptance that approaches the Yablo-novitch limit (Yablo-novitch, E. J. Opt. Soc. Am. 1987, 72, ...
Enhanced capacitive behaviour of graphene based electrochemical double layer capacitors by etheric substitution on ionic liquids
Siyahjani, Shirin; Oner, Saliha; Diker, Halide; GÜLTEKİN, BURAK; Varlikli, Canan (Elsevier BV, 2020-08-01)
In this study, we report the effect of etheric substituents in imidazolium and ammonium based ionic liquids (IL) on the performance of electrochemical double layer capacitors (EDLC) consisted of gel polymer electrolyte (GPE) and reduced graphene oxide (RGO) electrode. GPEs contain poly (vinylidene fluoride-hexafluompropylene) (PVDF-HFP) and the ILs. Ammonium and imidazolium based ionic liquids (ILs) differ by their length of etheric groups and etheric group contents, respectively. According to the cyclic vo...
Citation Formats
G. Kökbudak, E. Orhan, F. Es, E. Semiz, and R. Turan, “Optimization of Silicon Nitride (SiN X ) Anti-reflective coating (arc) and passivation layers using industrial plasma enhanced chemical vapor deposition (pecvd) for perc type solar cells,” 2018, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/41181.