3D-graphene-laser patterned p-type silicon Schottky diode

Orhan, Elif Oz
Efil, Esra
Bayram, Ozkan
Kaymak, Nuriye
Berberoğlu, Halil
Candemir, Ozun
Pavlov, Ihor
Ocak, Sema Bilge
© 2020 Elsevier LtdThe influence of the laser patterning (LP) process on the quality of graphene (Gr) film and Schottky diode characteristics was researched in this study. First of all, p-type silicon (Si) was patterned by homemade femtosecond laser source. To compare the resulting effect, non-patterned n-Si and p-Si were used as substrates. To achieve vertically oriented three-dimensional (3D) Gr nanosheets (VGNs) onto the laser patterned p-type Si, non-patterned n-Si, and p-Si substrates, we used Radio-Frequency Plasma Enhanced Chemical Vapor Deposition (RF-PECVD) technique. Then, Raman analyses for VGNs obtained on patterned and non-patterned p-Si and n-Si substrates were conducted. All results indicate that the Gr obtained on all substrates is vertically oriented. Scanning electron microscopy (SEM) analyses were also performed to obtain information about the morphological properties of the 3D Gr structure. In addition, the influence of the laser patterning at the Gr-Si interface was evaluated by comparing two sets of devices which are junctions of Gr-Laser Patterned Si (Gr-LPSi) and Gr-Insulator-Silicon (Gr-I-Si) at 300 K in the dark medium. D1 device consists of a Gr-LPSi junction that involves RF-PECVD grown Gr on the silicon, whose surface exposed the laser beam for patterning. D2 device consists of a Gr-I-Si junction that involves RF-PECVD grown Gr onto the silicon, whose surface involves a thin native oxide layer (~2 nm). The results show that the laser treatment causes an increment in Schottky barrier height (SBH) and decreases leakage currents under a reverse bias voltage of the diode. Notably, we have seen the influence of the laser patterning process on 3D Gr nano-sheets which is that the entire surface of the substrate has now reformed new structures in the nano-sphere and nano-rose morphology, so we believe that this is the first work that shows these structures in this form.
Materials Science in Semiconductor Processing


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Citation Formats
E. O. Orhan et al., “3D-graphene-laser patterned p-type silicon Schottky diode,” Materials Science in Semiconductor Processing, pp. 0–0, 2021, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/56200.