MEMS Temperature Sensor

Date

2017-11-08

Author

Köse, Talha

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This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

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The invention relates to resonant MEMS temperature sensors that sense the temperature changes by monitoring the frequency shifts of more than one DETF resonators (1, 2) resulting from the changing temperature.

URI

https://worldwide.espacenet.com/publicationDetails/biblio?II=0&ND=3&adjacent=true&locale=en_EP&FT=D&date=20171108&CC=EP&NR=3241005A1&KC=A1
https://hdl.handle.net/11511/70173

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Department of Mechanical Engineering, Patent / Utility Model

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Citation Formats

T. Köse, “MEMS Temperature Sensor,” 00, 2017.