Simplified process flow for the fabrication of PERC solar cells with ion implanted emitter

Date

2021-12-01

Author

Bektas, Gence
Kokbudak, Gamze
Kececi, Ahmet Emin
Butuner, Sumeyye Kocak
Asav, Hasan
Çiftpınar, Emine Hande
Canar, Hasan Huseyin
Arikan, Bulent
Turan, Rasit

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Ion implanted PERC cells have already achieved power conversion efficiencies of about 20.0%. The process flows reported in the literature for the ion implanted PERC cells with commonly utilized Al2O3/SiNx rear passivation stack, which has the benefit of being less sensitive to surface roughness than SiO2/SiNx stack passivation, notably suffer from the additional process steps such as single side polishing and single side protection. Here, we present a simplified process flow for the fabrication of ion implanted PERC cells having Al2O3/SiNx stack passivation at the textured rear surface without any rear side processing, leading to a power conversion efficiency of 20% at large area. In this context, we show the sensitivity of solar cell efficiency to firing peak temperature, implantation dose, and Al2O3 thickness. The results of the present research will provide a basis for high efficiency implanted PERC cells with significantly reduced workload and cost. (c) 2021 Elsevier Ltd. All rights reserved.

URI

https://hdl.handle.net/11511/94554

Journal

RENEWABLE ENERGY

DOI

https://doi.org/10.1016/j.renene.2021.08.054

Collections

Center for Solar Energy Research and Applications (GÜNAM), Article

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Citation Formats

G. Bektas et al., “Simplified process flow for the fabrication of PERC solar cells with ion implanted emitter,” RENEWABLE ENERGY, vol. 179, pp. 2295–2299, 2021, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/94554.