DESIGN AND FABRICATION OF PIEZOELECTRIC ENERGY HARVESTING MICRO DEVICES FOR BIOMEDICAL IMPLANTS

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2022-9-05

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Koyuncuoğlu, Aziz

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Biomedical implants such as cochlear implants (CI) are called ‘magical devices’ by many, since they enable people in the silence to hear again, and just like every other engineering marvel, they need an energy source to create their wonders. Today’s CIs are using batteries for this purpose but energy harvesting presents a favorable alternative. Among the different energy harvesting methods, piezoelectric materials are widely investigated due to their high power density and micro-integration possibilities. This study describes the design, fabrication, and experimental investigation of a piezoelectric energy harvesting micro chip suitable for next-generation fully implantable cochlear implant applications. To provide the power requirements of the state-of-art fully implantable cochlear implants, bulk and thin film PZT based energy harvesting and transducer chips were designed, fabricated, and tested. The microfabrication process flow of the chips was optimized. Finite element modeling was used to design a novel double cantilever energy harvester. Vibration and acoustic test setups were used to analyze the performance of the fabricated devices. In the acoustic tests, 16.25 µW power was obtained at 120 dB sound input with the single cantilever chips. Compared with the literature on similar microacoustic devices highest power density (1.5 × 10−3 W/cm3) was obtained. With the new double cantilever design chips, vibration tests at 1 g input acceleration resulted in maximum power of 61 µW. For the purpose of cochlear implantation, a new figure of merit for the energy harvester chips was defined. The final energy harvester chip provided the highest normalized power density per chip mass (214.8 µW/(cm3 *Hz * g2* mg)) among similar studies.

Subject Keywords

Piezoelectric Energy Harvesting, Fully Implantable Cochlear Implants, Acoustic Energy Harvesting, Bulk PZT, Pulsed Laser Deposited PZT

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https://hdl.handle.net/11511/99773

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Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats

A. Koyuncuoğlu, “DESIGN AND FABRICATION OF PIEZOELECTRIC ENERGY HARVESTING MICRO DEVICES FOR BIOMEDICAL IMPLANTS,” Ph.D. - Doctoral Program, Middle East Technical University, 2022.