Design and fabrication of rf mems switches and instrumentation for performance evaluation

Atasoy, Halil İbrahim
This thesis presents the RF and mechanical design of a metal-to-metal contact RF MEMS switch. Metal-to-metal contact RF MEMS switches are especially preferred in low frequency bands where capacitive switches suffer from isolation due to the limited reactance. Frequency band of operation of the designed switch is from DC to beyond X-band. Measured insertion loss of the structure is less than 0.2 dB, return loss is better than 30 dB, and isolation is better than 20 dB up to 20 GHz. Isolation is greater than 25 dB below 10 GHz. Hence, for wideband applications, this switch offers very low loss and high isolation. Time domain measurement is necessary for the investigation of the dynamic behavior of the devices, determination of the ‘pull in’ and ‘pull out’ voltages of the membranes, switching time and power handling of the devices. Also, failure and degradation of the switches can be monitored using the time domain setup. For these purposes a time domain setup is constructed. Moreover, failure mechanisms of the RF MEMS devices are investigated and a power electronic circuitry is constructed for the biasing of RF MEMS switches. Advantage of the biasing circuitry over the direct DC biasing is the multi-shape, high voltage output waveform capability. Lifetimes of the RF MEMS devices are investigated under different bias configurations. Finally, for measurement of complicated RF MEMS structures composed of large number of switches, a bias waveform distribution network is constructed where conventional systems are not adequate because of the high voltage levels. By this way, the necessary instrumentation is completed for controlling a large scale RF MEMS system.


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This thesis presents fabrication of shunt, capacitive contact type RF MEMS switches which are designed according to given mm-wave performance specifications. The designed switches are modified for investigation in terms of reliability and lifetime. To observe the real-time performance of switches a time domain measurement setup is established and a CV (capacitance vs. voltage) curve measurement system is also included to measure CV curves, pull-in and hold-down voltages and the shifts of these due to actuat...
Design of buck converter for educational test bench
Kılıç, Ümit Erdem; Üçtuğ, Yıldırım; Department of Electrical and Electronics Engineering (2006)
In this thesis a buck converter has been developed to be used as a test bench in power electronics laboratory. For this purpose, first, steady-state and small-signal analyses of a buck converter is carried out, then open-loop and closed-loop control of the converter are developed and simulated. Then, the circuit is manufactured and tested. The test results are compared with the simulation results. Finally, an experimantal procedure is prepared to enable the students to perform the experiment in the laborato...
Citation Formats
H. İ. Atasoy, “Design and fabrication of rf mems switches and instrumentation for performance evaluation,” M.S. - Master of Science, Middle East Technical University, 2007.