High performance near/short wavelength infrared megapixel InGaAs focal plane array fabrication development and new design proposals

Download

index.pdf

Date

2018

Author

Karaca, Utku

Metadata

Show full item record

Item Usage Stats

660
views

382
downloads

In0.53Ga0.47As is the most appropriate material system for Short Wavelength Infrared (SWIR) detection at ~1.7 μm cutoff wavelength with its relatively lower cost and high performance. Ultra-low dark current (~ nA/cm2) has been recently demonstrated in InGaAs photodetectors with planar type process by eliminating surface leakage current. Here, a fabrication procedure for planar InGaAs photodetectors with unique pixel isolation methods has been developed and ~10 nA/cm2 dark current density levels were obtained from 15 and 25 μm pitch megapixel and large format Focal Plane Arrays (FPA) where almost 100% internal quantum efficiency was measured. Mesa type InGaAs photodetectors were also fabricated to be able to make a comparison between two process types. Developed photodetectors were able to sense both Near Infrared (NIR) and visible region of electromagnetic spectrum by removing InP substrate and ~99.5% pixel operability was achieved in FPAs after flip-chip bonding and substrate removal. Furthermore, a novel all InGaAs nBn photodetector design was also proposed numerically in order to reduce surface leakage current particularly in mesa type photodetectors. Simulations were executed in Sentaurus TCAD numerical tool where InGaAs material properties were optimized with the data provided in literature, and also with the experimental results obtained in InGaAs photodetector fabrication. Shockley-Read-Hall (SRH), Auger, radiative and surface currents were modeled and more than 20 times improvement in dark current has been shown to be achievable by utilizing nBn photodetector compared to conventional p-n InP/InGaAs photodetectors without degrading responsivity.

Subject Keywords

Optical detectors., Infrared technology.

URI

http://etd.lib.metu.edu.tr/upload/12622282/index.pdf
https://hdl.handle.net/11511/27397

Collections

Graduate School of Natural and Applied Sciences, Thesis

Suggestions

OpenMETU
Core

Development of high fill factor and high performance uncooled infrared detector pixels Küçük, Şeniz Esra; Akın, Tayfun; Department of Electrical and Electronics Engineering (2011) This thesis presents the design, fabrication and characterization of high performance and high fill factor surface micromachined uncooled infrared resistive microbolometer detectors which can be used in large format focal plane arrays (FPAs). The detector pixels, which have a pixel pitch of 25 μm, are designed and fabricated as two-level structures using the enhanced sandwich type resistor while the active material is selected as Yttrium Barium Copper Oxide (YBCO). First level of the pixel structure is allo...
High performance short wavelength infrared focal plane arrays Çırçır, Kübra; Beşikci, Cengiz; Department of Electrical and Electronics Engineering (2017) Short Wavelength Infrared (SWIR) band is desirable for many applications such as night vision, spectroscopy and hyperspectral imaging. Indium Gallium Arsenide (In0.53Ga0.47As) is a suitable material for SWIR photodetectors. This thesis focuses on the investigation of the pixel characteristics of a 15 µm pitch large format (640x512) focal plane array (FPA) with In0.53Ga0.47As absorber and Al0.52In0.48As p-type cap layers as an alternative to the conventional In0.53Ga0.47As detectors utilizing InP as the p-ca...
Development of D -type fiber optic sensors for detection of refractive index variation in evanescent wave field / Güleryüz, Burcu; Durucan, Caner; Aslan, Mustafa M.; Department of Metallurgical and Materials Engineering (2014) The purpose of this study is to design, construct, develop and test D-type multimode fiber optic (F/O) sensors based on evanescent wave field sensing. A comprehensive work has been performed both theoretically and experimentally using a geometrical modification approach to improve the sensors response in different manners for detecting the refractive index (RI) variations and bio-molecular interactions in aqueous environment. In this study, the D-type F/O sensors performance was improved utilizing optical w...
Optical system design of direct detection short-pulsed laser proximity sensor Korkmaz, Emrah; Yerci, Selçuk; Demir, Şimşek; Department of Micro and Nanotechnology (2017) In this study, we designed a Laser Proximity Sensor system that measures the distance by analyzing the echo signal reflected from object using time-of-flight principle. The sensor makes a direct-detection using a short-pulsed laser and is capable of detecting objects and measuring distances in a range between 0.5 m and 10 m far from the system. Reflectivities of objects are assumed to lie between 20% and 90% and obeying to Lambertian BSDF (Bi-Directional Scatter Distribution Function). A mathematical model ...
Development of high performance uncooled infrared detector materials Kebapçı, Başak; Akın, Tayfun; Turan, Raşit; Department of Micro and Nanotechnology (2011) This thesis reports both the optimizations of the vanadium oxide (VOx) thin film as an active infrared detector material by the magnetron sputtering deposition method and its use during fabrication of proper resistors for the microbolometers. Vanadium oxide is a preferred material for microbolometers, as it provides high TCR value, low noise, and reasonable resistance, and a number of high-tech companies have used this material to obtain state-of-the-art microbolometer arrays. This material is first used in...

Citation Formats

U. Karaca, “High performance near/short wavelength infrared megapixel InGaAs focal plane array fabrication development and new design proposals,” M.S. - Master of Science, Middle East Technical University, 2018.