Evolution of SiO2 matrix during the formal-ion of Ge and Si nanocrystals by ion implantation

Date

2005-10-01

Author

SERİNCAN, UĞUR
Yerci, Selçuk
KULAKCI, MUSTAFA
Turan, Raşit

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Fourier transformed infrared spectroscopy (FTIR) has been employed to observe and understand structural variations in SiO2 matrix during the formation of Ge and Si nanocrystals by ion implantation as a function of processing parameters. The Si-O asymmetric stretching peak of absorption spectra were used to monitor the evolution of SiOx (x < 2) films during the annealing process. It was shown that the recovery process in Si-O network is quite different in Ge and Si implanted samples and the deformation caused by Ge atoms in the SiO2 matrix can be recovered by annealing the implanted samples at lower temperatures than that by Si atoms. This is in agreement with the formation kinetics of the Si and Ge nanocrystals in SiO2 as observed by Raman spectroscopy and photoluminescence measurements of the same samples.

Subject Keywords

Si, Ge, Nanocrystal, SiO2, FTIR

URI

https://hdl.handle.net/11511/31287

Journal

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

DOI

https://doi.org/10.1016/j.nimb.2005.04.120

Collections

Graduate School of Natural and Applied Sciences, Article

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Citation Formats

U. SERİNCAN, S. Yerci, M. KULAKCI, and R. Turan, “Evolution of SiO2 matrix during the formal-ion of Ge and Si nanocrystals by ion implantation,” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, pp. 419–425, 2005, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/31287.