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A wide-bandwidth and high-sensitivity robust microgyroscope

Sahin, Korhan
Sahin, Emre
Alper, Said Emre
Akın, Tayfun
This paper reports a microgyroscope design concept with the help of a 2 degrees of freedom (DoF) sense mode to achieve a wide bandwidth without sacrificing mechanical and electronic sensitivity and to obtain robust operation against variations under ambient conditions. The design concept is demonstrated with a tuning fork microgyroscope fabricated with an in-house silicon-on-glass micromachining process. When the fabricated gyroscope is operated with a relatively wide bandwidth of 1 kHz, measurements show a relatively high raw mechanical sensitivity of 131 mu V (degrees s(-1))(-1). The variation in the amplified mechanical sensitivity (scale factor) of the gyroscope is measured to be less than 0.38% for large ambient pressure variations such as from 40 to 500 mTorr. The bias instability and angle random walk of the gyroscope are measured to be 131 degrees h(-1) and 1.15 degrees h(-1/2), respectively.