A wide-bandwidth and high-sensitivity robust microgyroscope

Download

index.pdf

Date

2009-07-01

Author

Sahin, Korhan
Sahin, Emre
Alper, Said Emre
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

62
views

0
downloads

This paper reports a microgyroscope design concept with the help of a 2 degrees of freedom (DoF) sense mode to achieve a wide bandwidth without sacrificing mechanical and electronic sensitivity and to obtain robust operation against variations under ambient conditions. The design concept is demonstrated with a tuning fork microgyroscope fabricated with an in-house silicon-on-glass micromachining process. When the fabricated gyroscope is operated with a relatively wide bandwidth of 1 kHz, measurements show a relatively high raw mechanical sensitivity of 131 mu V (degrees s(-1))(-1). The variation in the amplified mechanical sensitivity (scale factor) of the gyroscope is measured to be less than 0.38% for large ambient pressure variations such as from 40 to 500 mTorr. The bias instability and angle random walk of the gyroscope are measured to be 131 degrees h(-1) and 1.15 degrees h(-1/2), respectively.

Subject Keywords

Mechanical Engineering, Electrical and Electronic Engineering, Mechanics of Materials, Electronic, Optical and Magnetic Materials

URI

https://hdl.handle.net/11511/35252

Journal

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

DOI

https://doi.org/10.1088/0960-1317/19/7/074004

Collections

Department of Electrical and Electronics Engineering, Article

Suggestions

OpenMETU
Core

A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope Alper, Said Emre; Temiz, Yuksel; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2008-12-01) This paper presents the development of a compact single-axis angular rate sensor system employing a 100-mu m-thick single-crystal silicon microelectromechanical systems gyroscope with an improved decoupling arrangement between the drive and sense modes. The improved decoupling arrangement of the gyroscope enhances the robustness of sensing frame against drive-mode oscillations and therefore minimizes mechanical crosstalk between the drive and sense modes, yielding a small bias instability. The gyroscope cor...
An on-die ultra-low voltage DC-DC step-up converter with voltage doubling LC-tank Jayaweera, H. M. P. C.; Pathirana, W. P. M. R.; Muhtaroglu, Ali (IOP Publishing; 2016-12-01) In this paper we report the design, characterization and verification of a novel on-die ultra-low voltage DC-DC converter circuit for energy harvester applications in 0.18 mu m complementary metal oxide semiconductor (CMOS) technology. The circuit self-starts, does not use off-chip components, and is thus suitable for use in highly integrated low cost systems. The first version of the design has a five-stage charge-pump stimulated by an oscillator with two center-tap inductors. It is validated on a test chi...
An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth Sonmezoglu, Soner; Alper, Said Emre; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2014-04-01) This paper presents the architecture and experimental verification of the automatic mode-matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to achieve and maintain matched resonance mode frequencies. The system also allows adjusting the system bandwidth with the aid of the proportional-integral controller parameters of the sense-mode force-feedback controller, independently from the mechanical sensor bandwidth. This paper experimentally examines...
Design and fabrication of a high performance resonant MEMS temperature sensor Kose, Talha; Azgın, Kıvanç; Akın, Tayfun (IOP Publishing, 2016-04-01) This paper presents a high performance MEMS temperature sensor comprised of a double-ended-tuning-fork (DETF) resonator and strain-amplifying beam structure. The temperature detection is based on the 'thermal strain induced frequency variations' of the DETF resonator. The major source of thermal strain leading to the frequency shifts is the difference in thermal expansion coefficients of the substrate and the device layers of the fabricated structures. By selecting the substrate as glass and the device laye...
A low-cost uncooled infrared microbolometer detector in standard CMOS technology Tezcan, DS; Eminoglu, S; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2003-02-01) This paper reports the development of a low-cost uncooled infrared microbolometer detector using a commercial 0.8 mum CMOS process, where the CMOS n-well layer is used as the infrared sensitive material. The n-well is suspended by front-end bulk-micromachining of the fabricated CMOS dies using electrochemical etch-stop technique in TMAH. Since this approach does not require any lithography or infrared sensitive material deposition after CMOS fabrication, the detector cost is almost equal to the CMOS chip co...

Citation Formats

K. Sahin, E. Sahin, S. E. Alper, and T. Akın, “A wide-bandwidth and high-sensitivity robust microgyroscope,” JOURNAL OF MICROMECHANICS AND MICROENGINEERING, pp. 0–0, 2009, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/35252.