A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope

Date

2008-12-01

Author

Alper, Said Emre
Temiz, Yuksel
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

174
views

0
downloads

This paper presents the development of a compact single-axis angular rate sensor system employing a 100-mu m-thick single-crystal silicon microelectromechanical systems gyroscope with an improved decoupling arrangement between the drive and sense modes. The improved decoupling arrangement of the gyroscope enhances the robustness of sensing frame against drive-mode oscillations and therefore minimizes mechanical crosstalk between the drive and sense modes, yielding a small bias instability. The gyroscope core element is fabricated by through-etching a 100-mu m-thick silicon substrate which is anodically bonded to a recessed glass handling substrate. A patterned metal layer is included at the bottom of the silicon substrate, both as an etch-stop layer and a heat sink to prevent heating- and notching-based structural deformations encountered in deep dry etching in the silicon-on-glass process. The fabricated-gyroscope core element has capacitive actuation/sensing gaps of about 5 mu m yielding an aspect ratio close to 20, providing a large differential sense capacitance of 18.2 pF in a relatively small footprint of 4.6 mm x 4.2 mm. Excitation and sensing electronics of the gyroscope are constructed using off-the-shelf integrated circuits and fit in a compact printed circuit board of size 54 mm x 24 mm. The complete angular rate sensor system is characterized in a vacuum ambient at a pressure of 5 mtorr and demonstrates a turn-on bias of less than 0.1 deg/s, bias instability of 14.3 deg/h, angle random walk better than 0.115 deg/root h, and a scale-factor nonlinearity of +/- 0.6% in full-scale range of +/- 50 deg/s.

Subject Keywords

Mechanical Engineering, Electrical and Electronic Engineering

URI

https://hdl.handle.net/11511/41971

Journal

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

DOI

https://doi.org/10.1109/jmems.2008.2007274

Collections

Department of Electrical and Electronics Engineering, Article

Suggestions

OpenMETU
Core

An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth Sonmezoglu, Soner; Alper, Said Emre; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2014-04-01) This paper presents the architecture and experimental verification of the automatic mode-matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to achieve and maintain matched resonance mode frequencies. The system also allows adjusting the system bandwidth with the aid of the proportional-integral controller parameters of the sense-mode force-feedback controller, independently from the mechanical sensor bandwidth. This paper experimentally examines...
A monolithic three-axis micro-g micromachined silicon capacitive accelerometer Chae, J; Külah, Haluk; Najafi, K (Institute of Electrical and Electronics Engineers (IEEE), 2005-04-01) A monolithic three-axis micro-g resolution silicon capacitive accelerometer system utilizing a combined surface and bulk micromachining technology is demonstrated. The accelerometer system consists of three individual single-axis accelerometers fabricated in a single substrate using a common fabrication process. All three devices have 475-mu m-thick silicon proof-mass, large area polysilicon sense/drive electrodes, and small sensing gap (< 1.5 mu m) formed by a sacrificial oxide layer. The fabricated accele...
A Compact Energy Transducer for Power Generation From Respiration Beyaz, Mustafa Ilker; Habibiabad, Sahar; Yildiz, Hamza; Goreke, Utku; Azgın, Kıvanç (Institute of Electrical and Electronics Engineers (IEEE), 2019-06-01) This paper reports a compact magnetic transducer developed for generating electrical power from respiration. The device incorporates a side-drive turbine rotor with embedded permanent magnets and two stators, integrated into a poly(methyl methacrylate) (PMMA) package for actuation. The novelty and advantage of the design lies in almost full use of the available turbine volume together with two stators for both mechanical and electrical transduction, which leads to high rotational speeds and high voltage gen...
A current source converter based statcom for reactive power compensation at low voltage Biçer, Nazan; Ermiş, Muammer; Department of Electrical and Electronics Engineering (2010) This research work is devoted to the analysis, design and development of the Current-Source Converter (CSC) based distribution-type Static Synchronous Compensator (D-STATCOM) for low-voltage applications in reactive-power control in order to achieve i) faster transient response in reactive-power control, ii) lower current harmonic distortion, iii) lower power losses and iv) minimum storage elements in comparison with conventional solutions. The developed CSC-D-STATCOM includes a low-pass input filter and a ...
High performance readout and control electronics for mems gyroscopes Şahin, Emre; Akın, Tayfun; Department of Electrical and Electronics Engineering (2009) This thesis reports the development of various high performance readout and control electronics for implementing angular rate sensing systems using MEMS gyroscopes developed at METU. First, three systems with open loop sensing mechanisms are implemented, where each system has a different drive-mode automatic gain controlled (AGC) self-oscillation loop approach, including (i) square wave driving signal with DC off-set named as OLS_SquD, (ii) sinusoidal driving signal with DC off-set named as OLS_SineD, and i...

Citation Formats

S. E. Alper, Y. Temiz, and T. Akın, “A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope,” JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, pp. 1418–1429, 2008, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/41971.