Determination of impurity profiles in silicon by anodic oxidation.

Date

1983

Author

Küçükturhan, Kazım

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URI

https://hdl.handle.net/11511/3544

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Graduate School of Natural and Applied Sciences, Thesis

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Citation Formats

K. Küçükturhan, “Determination of impurity profiles in silicon by anodic oxidation.,” Middle East Technical University, 1983.