Low temperature aluminum doped zinc oxide thin film deposition on ultra-thin flexible glass and PET substrates by RF magnetron sputtering

Date

2015-04-29

Author

Demircioglu, Zeynep
Ozkol, Engin
Nasser, Hisham
Turan, Raşit

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

180
views

0
downloads

Aluminum doped zinc oxide (AZO) thin films are prepared on ultra-thin flexible glass and flexible polyethylene terephthalate (PET) substrates at room temperature by radio frequency (RF) magnetron sputtering. Optimization of films has been achieved by varying process parameters to reach the demands of proper conductive layer for thin silicon solar cell applications. Structural analysis of the films was done by X-ray diffraction spectroscopy. Optical and electrical properties of the films were carried out by means of UV-Visible spectroscopy, and four point probe measurements. Thickness of the films was obtained by spectroscopic ellipsometry. Transmission measurements clearly show that by decreasing pressure transmission of the AZO film is improved in the UV region. Our results show that by varying the deposition parameters, low resistivity films of 1.1x10(-3) Ocm and 1x10(-3) Ocm were obtained on PET and on ultra-thin flexible substrates, respectively. (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Subject Keywords

Flexible substrates, Solar cells, RF magnetron sputtering, Aluminium doped zinc oxide

URI

https://hdl.handle.net/11511/37205

DOI

https://doi.org/10.1002/pssc.201510144

Collections

Department of Physics, Conference / Seminar

Suggestions

OpenMETU
Core

Low temperature crystallization of amorphous silicon by gold nanoparticle Karaman, M.; AYDIN, MURAT; Sedani, S. H.; ERTÜRK, KADİR; Turan, Raşit (Elsevier BV, 2013-08-01) Single crystalline Si thin film fabricated on glass substrate by a process called Solid Phase Crystallization (SPC) is highly desirable for the development of high efficiency and low cost thin film solar cells. However, the use of ordinary soda lime glass requires process temperatures higher than 600 degrees C. Crystallization of Si film at around this temperature takes place in extremely long time exceeding 20 h in most cases. In order to reduce this long process time, new crystallization techniques such a...
FABRICATION AND CHARACTERIZATION OF TiO2 THIN FILM FOR DEVICE APPLICATIONS HOSSEINI, AREZOO; GÜLLÜ, HASAN HÜSEYİN; COŞKUN, EMRE; Parlak, Mehmet; Erçelebi, Ayşe Çiğdem (2019-07-01) Titanium oxide (TiO2) film was deposited by rectification factor (RF) magnetron sputtering technique on glass substrates and p-Si (111) wafers to fabricate n-TiO2/p-Si heterojunction devices for the investigation of material and device properties, respectively. The structural, surface morphology, optical and electrical properties of TiO(2 )film were characterized by means of scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), UV-visual (UV-Vis) spectral and dark curre...
High temperature microstructural stability and recrystallization mechanisms in 14YWT alloys Aydoğan Güngör, Eda; Takajo, S.; Vogel, S. C.; Maloy, S. A. (Elsevier BV, 2018-04-01) In-situ neutron diffraction experiments were performed on room temperature compressed 14YWT nanostructured ferritic alloys at 1100 degrees C and 1150 degrees C to understand their thermally activated static recrystallization mechanisms. Existence of a high density of Y-Ti-O rich nano-oxides ( and {112} texture components during annealing, in contrast to the conventional recrystallization textures in body centered cubic alloys. Furthermore, nano-oxide size, shape, density and distribution are considerably di...
Fully metal oxide charge selective layers for n-i-p perovskite solar cells employing nickel oxide nanoparticles Icli, Kerem Cagatay; Özenbaş, Ahmet Macit (2018-02-10) An alcohol based nickel oxide nanoparticle dispersion was prepared and used to deposit hole conductor medium for a polymeric substance free perovskite solar cell in mesoscopic n-i-p configuration. In contrast to conventional p-i-n configuration or inverted type perovskite solar cells, nickel oxide layer was spin coated directly on perovskite layer and the perovskite layer was sandwiched between two metal oxides, TiO2 and NiO, resulting in n-i-p configuration. High surface area nickel oxide nanoparticles wer...
High performance PEM fuel cell catalyst layers with hydrophobic channels Avcioglu, Gokce S.; FIÇICILAR, BERKER; BAYRAKÇEKEN YURTCAN, Ayşe; Eroğlu, İnci (2015-06-29) Polymer electrolyte membrane fuel cell performance has been enhanced with efficient water management by modification of the structure of the catalyst layer. Polytetrafluoroethylene (PTFE) was added to the catalyst layer structure by using two-step catalyst ink preparation method. Physical and electrochemical characterization of catalyst layers with hydrophobic nanoparticles were investigated via TGA-DTA, XRD, nitrogen physisorption, SEM, TEM, EDX analysis, and cyclic voltammetry technique. In addition, perf...

Citation Formats

Z. Demircioglu, E. Ozkol, H. Nasser, and R. Turan, “Low temperature aluminum doped zinc oxide thin film deposition on ultra-thin flexible glass and PET substrates by RF magnetron sputtering,” 2015, vol. 12, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/37205.