Diamond-Based Capacitive Micromachined Ultrasonic Transducers in Immersion

Cetin, Ahmet Murat
Bayram, Barış
Diamond is a superior membrane material for capacitive micromachined ultrasonic transducers (CMUTs). By using ultrananocrystalline diamond (UNCD) membrane and plasma-activated wafer bonding technology, a single diamond-based circular CMUT is demonstrated and operated in immersion for the first time. The diamond-based CMUT, biased at 100 V, is excited with a 10-cycle burst of 36 Vp-p sine signal at 3.5 MHz. Pressure generated on a 2-D plane coincident with the normal of the CMUT is measured using a broadband hydrophone. Peak-to-peak hydrophone voltage measurements along the scan area clearly indicate the main lobe and the side lobes, as theoretically predicted by our directivity function calculations. The peak-to-peak hydrophone voltage on the axial direction of the CMUT is found to be in agreement with our theoretical calculations in the Fraunhofer region (-45 mm < y < -15 mm). The spectrum of the diamond-based CMUT is measured for a dc bias of 100 V, and ac excitation with 30-cycle bursts of 9, 36, and 54 Vp-p sine signal. A peak response at 5.6 MHz is measured for all ac amplitudes. Overall, diamond is shown to be an applicable membrane for CMUT devices and applications.


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Citation Formats
A. M. Cetin and B. Bayram, “Diamond-Based Capacitive Micromachined Ultrasonic Transducers in Immersion,” IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, pp. 414–420, 2013, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/40263.