Diamond-Based Capacitive Micromachined Ultrasonic Transducers in Immersion

Date

2013-02-01

Author

Cetin, Ahmet Murat
Bayram, Barış

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

176
views

0
downloads

Diamond is a superior membrane material for capacitive micromachined ultrasonic transducers (CMUTs). By using ultrananocrystalline diamond (UNCD) membrane and plasma-activated wafer bonding technology, a single diamond-based circular CMUT is demonstrated and operated in immersion for the first time. The diamond-based CMUT, biased at 100 V, is excited with a 10-cycle burst of 36 Vp-p sine signal at 3.5 MHz. Pressure generated on a 2-D plane coincident with the normal of the CMUT is measured using a broadband hydrophone. Peak-to-peak hydrophone voltage measurements along the scan area clearly indicate the main lobe and the side lobes, as theoretically predicted by our directivity function calculations. The peak-to-peak hydrophone voltage on the axial direction of the CMUT is found to be in agreement with our theoretical calculations in the Fraunhofer region (-45 mm < y < -15 mm). The spectrum of the diamond-based CMUT is measured for a dc bias of 100 V, and ac excitation with 30-cycle bursts of 9, 36, and 54 Vp-p sine signal. A peak response at 5.6 MHz is measured for all ac amplitudes. Overall, diamond is shown to be an applicable membrane for CMUT devices and applications.

Subject Keywords

TECHNOLOGY

URI

https://hdl.handle.net/11511/40263

Journal

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

DOI

https://doi.org/10.1109/tuffc.2013.2578

Collections

Department of Electrical and Electronics Engineering, Article

Suggestions

OpenMETU
Core

Diamond-based capacitive micromachined ultrasonic transducers Bayram, Barış (2012-02-01) Capacitive micromachined ultrasonic transducers (CMUTs) employing diamond membranes are demonstrated. The design, finite element modeling, microfabrication, and experimental characterization of diamondbased CMUTs are reported. Ultrananocrystalline diamond having a chemical mechanical polished silicon dioxide interlayer deposited via high temperature oxide (HTO) process at 850 degrees C in a low pressure chemical vapor deposition (LPCVD) furnace is employed as the membrane to form vacuum sealed cavities usin...
Dark current mechanisms and passivation of InAsSb infrared photodiodes on alternative substrates Ersagun, Özlem; Beşikci, Cengiz; Department of Electrical and Electronics Engineering (2005) This thesis reports a detailed characterization of indium arsenide antimonide (InAs1- xSbx) photodetectors grown on gallium arsenide (GaAs) substrate by molecular beam epitaxy. A combination of polyimide and sulphur and a single layer of polyimide were used as passivation films in this study. Two different epilayer structures were used for assessing the detector performance and comparing the above passivation layers. For the first structure, the optical measurements revealed that Sb mole fraction was 0.13 a...
Glass fiber reinforced sealants for solid oxide fuel cells Timurkutluk, Bora; Altan, Tolga; Celik, Selahattin; Timurkutluk, Cigdem; PALACI, Yüksel (Elsevier BV, 2019-07-05) Novel sealants for solid oxide fuel cells are developed by addition of glass fiber into glass ceramic as a reinforcement material. Various sealants including three different fiberglass types and four different structural designs are fabricated. The mechanical and sealing performances of the sealants are investigated via tensile and short stack leakage tests, respectively. The tensile tests reveal that the fracture strength of the sealants varies depending on the type and number of the glass fiber used. In g...
Use of membrane bioreactors in treatment and re-use of domestic wastewaters Komesli, Okan Tarık; Gökçay, Celal Ferdi; Department of Environmental Engineering (2006) This study was carried out to investigate performance of a Vacuum Rotating Membrane (VRM) type membrane bioreactor (MBR). During the study, the VRM plant was erected from scratch and operated in METU campus. The plant was composed of two tanks. First one was about 100 m3 and it was used for biological treatment; the second tank, about 30 m3, was used as filter chamber. The permeate flow rate was adjusted between 6 and 8.5 m3/h giving a hydraulic retention time (HRT) of 18 hours during the study. In the aera...
Mechanical characterization of filament wound composite tubes by internal pressure testing Karpuz, Pınar; Ankara, Osman Alpay; Department of Metallurgical and Materials Engineering (2005) The aim of this study is to determine the mechanical characteristics of the filament wound composite tubes working under internal pressure loads, generating data for further investigation with a view of estimating the remaining life cycle of the tubes during service. Data is generated experimentally by measuring the mechanical behavior like strains in hoop direction, maximum hoop stresses that are formed during internal pressure loading. Results have been used to identify and generate the necessary data to ...

Citation Formats

A. M. Cetin and B. Bayram, “Diamond-Based Capacitive Micromachined Ultrasonic Transducers in Immersion,” IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, pp. 414–420, 2013, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/40263.