Control of the thickness distribution of evaporated functional electroceramic NTC thermistor thin films

Date

2008-04-01

Author

Schmidt, R.
Parlak, Mehmet
Brinkman, Am

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

151
views

0
downloads

In this work the thickness distribution of NTC thermistor thin films produced by low deposition rate (0.8 nm s(-1)) electron-beam evaporation is investigated. The target preparation, deposition conditions and geometrical set-up of the evaporation mechanism are described in detail. The evaporation geometry is shown to be critical for the thickness distribution of evaporated films. The film thickness distribution of evaporated layers was measured across a macroscopic film surface using Alpha Step stylus profileometer. The thickness distribution was fitted using a geometrical model derived from evaporation theory, based on the Hertz-Knudsen equation and a modified version of the cosine law of emission. From this model, the sticking coefficient of the vapour on the substrates could be estimated to be 80 +/- 1.5%.

Subject Keywords

Modelling and Simulation, Industrial and Manufacturing Engineering, Metals and Alloys, Ceramics and Composites, Computer Science Applications

URI

https://hdl.handle.net/11511/40558

Journal

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

DOI

https://doi.org/10.1016/j.jmatprotec.2007.08.014

Collections

Department of Physics, Article

Suggestions

OpenMETU
Core

Effect of solidification rate on spatial distribution of SiC particles in A356 alloy composites CETIN, Arda; Kalkanlı, Ali (Elsevier BV, 2008-08-26) The damage and deformation behaviour of particulate reinforced metal matrix composites (PMMCs) can be highly sensitive to local variations in spatial distribution of reinforcement particles, which markedly depend on melt processing and solidification stages during production of PMMCs. The present paper attempts to study the effect of solidification rate on cluster formation in an Al-Si-Mg (A356) alloy composite reinforced with SiC particles and to explore the applicability of spatial functions to PMMC micro...
Analysis of the standard deviation of surface potential fluctuations in MOS interface from DLTS spectra Ozder, S; Atilgan, I; Katircioglu, B (IOP Publishing, 1998-05-01) The surface potential fluctuations can have significant effects on both the magnitude and shape of the measured small-pulse DLTS spectrum. An increase in the dispersion parameter sigma(S) of the surface potential distribution, which is assumed to have a Gaussian form, leads to a reduction in the DLTS signal size, a shift of the peak position and a broadening of the peak shape. A computer program including the exponential temperature dependence of hole capture cross section, sigma(P) = sigma(0) exp(-Delta E-...
Processing and characterisation of model optomechanical composites in the system sapphire fibre/borosilicate glass matrix Boccaccini, Aldo R; Acevedo, D; Dericioğlu, Arcan Fehmi; Jana, C (Elsevier BV, 2005-11-10) Optomechanical composites based on the system sapphire fibre/borosilicate glass matrix were fabricated and characterised. Different techniques of fabrication were used: composites with randomly orientated chopped sapphire fibres were produced by powder technology and pressureless sintering, whilst unidirectionally oriented fibre composites were fabricated by hot-pressing as well as by sandwiching glass slides and arrays of parallel fibres followed by heat-treatment. Pressureless sintered samples were poorly...
Sheet metal forming analyses with an emphasis on the springback deformation FIRAT, MEHMET; Kaftanoglu, Bilgin; Eser, Orhan (Elsevier BV, 2008-01-21) An accurate modeling of the sheet metal deformations including the springback is one of the key factors in the efficient utilization of FE process simulation in the industrial setting. In this paper, a rate-independent anisotropic plasticity model accounting the Bauschinger effect is presented and applied in the FE forming and springback analyses. The proposed model uses the Hill's quadratic yield function in the description of the anisotropic yield loci of planar and transversely anisotropic sheets. The ma...
Generalized transient temperature behavior in induction heated workpieces OKMAN, Oya; Dursunkaya, Zafer; Tekkaya, A. Erman (Elsevier BV, 2009-09-19) Electromagnetic-thermal coupled numerical analysis of induction heating is time intensive if three-dimensional models are used. In this study, by processing the results of finite element computations, a dimensional analysis is carried out to predict the transient temperature rise time at the surface of an induction heated workpiece. A unique set of curves is found that describes the transient dimensionless temperature at a point on the surface as a function of the electromagnetic skin depth alone. The effec...

Citation Formats

R. Schmidt, M. Parlak, and A. Brinkman, “Control of the thickness distribution of evaporated functional electroceramic NTC thermistor thin films,” JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, pp. 412–416, 2008, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/40558.