2-D analysis of Ge implanted SiO(2) surfaces by laser-induced breakdown spectroscopy

Yalcin, Serife
Oerer, Sabiha
Turan, Raşit
2-D elemental distribution of Ge in silicon oxide substrates with differing implantation doses of between 3x10(16) cm(-2) and 1.5x10(17) cm(-2) has been investigated by Laser-induced Breakdown Spectroscopy (LIBS). Spectral emission intensity has been optimized with respect to time, crater size, ablation depth and laser energy. Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) coupled with Energy-Dispersive X-Ray Spectroscopy (EDX) have been utilized to obtain crater depth, morphology and elemental composition of the sample material, respectively. LIBS spectral data revealed the possibility of performing 2-D distribution analysis of Ge atoms in silicon oxide substrate. EDX analysis results confirmed that LIBS is capable to detect Ge atoms at concentrations lower than 0.2% (atomic). LIBS as a fast semi-quantitative analysis method with 50 mu m lateral and 800 nm depth resolution has been evaluated. Results illustrate the potential use of LIBS for rapid, on-line assessment of the quality of advanced technology materials during the manufacturing process.


Analysis of the Raman intensities near the phase transitions in ammonium halides
Yurtseven, Hasan Hamit (Elsevier BV, 2008-12-01)
This study concentrates on the temperature dependence of the Raman intensities for the lattice modes in ammonium halides (NH4Cl and NH4Br) close to phase transitions, We predict their intensities using the results of a shell model for the Raman polarizability within the framework of an Ising pseudospin-phonon coupled model.
The use of concomitant elements to evaluate an Ar-N-2 mixed-gas plasma by electrothermal vaporization inductively coupled plasma orthogonal time-of-flight mass spectrometry
Balsanek, William J.; Ertaş, Gülay; Holcombe, James A. (Elsevier BV, 2006-06-01)
The performance of an Ar-N-2 mixed-gas plasma was compared to an At plasma using electrothermal vaporization as a sample introduction source to an inductively coupled plasma orthogonal time-of-flight mass spectrometer. The effect of sample matrices NaNO3 and Pd(NO3)(2) on a multi-element solution was investigated in mass amounts ranging from 0.1 to 5 mu g of the metal matrix (e.g., Na and Pd). Addition of 2% N-2 to the outer plasma gas of an Ar plasma reduced signal suppressions observed in the presence of ...
Interactions of tamoxifen with distearoyl phosphatidylcholine multilamellar vesicles: FTIR and DSC studies
Bilge, Duygu; ŞAHİN, İPEK; KAZANCI, NADİDE; Severcan, Feride (Elsevier BV, 2014-09-15)
Interactions of a non-steroidal antiestrogen drug, tamoxifen (TAM), with distearoyl-sn-glycero-3-phosphatidylcholine (DSPC) multilamellar liposomes (MLVs) were investigated as a function of drug concentration (1-15 mol%) by using two noninvasive techniques, namely Fourier transform infrared (FTIR) spectroscopy and differential scanning calorimetry (DSC). FTIR spectroscopy results show that increasing TAM concentrations (except 1 mol%) increased the wavenumbers of the CH2 stretching modes, implying an disord...
Temperature dependence of the damping constant and the order parameter close to the lambda phase transitions in ammonium halides
Yurtseven, Hasan Hamit (Elsevier BV, 2006-10-01)
This study gives our calculation for the damping constant, using the expressions derived for an Ising pseudospin-phonon coupled system in the ammonium halides (NH4Cl and NH4Br). For this calculation of the damping constant, we use the temperature dependence of the order parameter calculated from the molecular field theory. We predict here the damping constants for the v(5) (174 cm(-1)) and v(5) (177 cm(-1)) Raman modes of NH4Cl and NH4Br, respectively, below T-lambda and compare them with our observed bandw...
Quantum chemical studies on some seleanaphthalene derivatives
Türker, Burhan Lemi (Elsevier BV, 2005-04-01)
Quantum chemical studies on certain selenanaphthalene derivatives (having a keto or enol group and also Se atom in five- or six-membered ring system fused with naphthalene moiety) have been carried out using PM3 method at the level of restricted Hartree-Fock approach. The aquated systems have also been considered.
Citation Formats
S. Yalcin, S. Oerer, and R. Turan, “2-D analysis of Ge implanted SiO(2) surfaces by laser-induced breakdown spectroscopy,” SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, pp. 1130–1138, 2008, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/40778.