Terahertz Bandpass Frequency Selective Surfaces on Glass Substrates Using a Wet Micromachining Process

Date

2017-08-01

Author

Ramzan, Mehrab
Khan, Talha Masood
Bolat, Sami
NEBİOĞLU, Mehmet Ali
Altan, Hakan
Okyay, Ali Kemal
Topalli, Kagan

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

184
views

0
downloads

This paper presents terahertz (THz) frequency selective surfaces (FSS) implemented on glass substrate using standard microfabrication techniques. These FSS structures are designed for frequencies around 0.8 THz. A fabrication process is proposed where a 100-mu m-thick glass substrate is formed through the HF etching of a standard 500-mu m-thick low cost glass wafer. Using this fabrication process, three separate robust designs consisting of single-layer FSS are investigated using high-frequency structural simulator (HFSS). Based on the simulation results, the first design consists of a circular ring slot in a square metallic structure on top of a 100-mu m-thick Pyrex glass substrate with 70% transmission bandwidth of approximately 0.07 THz, which remains nearly constant till 30A degrees angle of incidence. The second design consists of a tripole structure on top of a 100-mu m-thick Pyrex glass substrate with 65% transmission bandwidth of 0.035 THz, which remains nearly constant till 30A degrees angle of incidence. The third structure consists of a triangular ring slot in a square metal on top of a 100-mu m-thick Pyrex glass substrate with 70% transmission bandwidth of 0.051 THz, which remains nearly constant up to 20A degrees angle of incidence. These designs show that the reflections from samples can be reduced compared to the conventional sample holders used in THz spectroscopy applications, by using single layer FSS structures manufactured through a relatively simple fabrication process. Practically, these structures are achieved on a fabricated 285-mu m-thick glass substrate. Taking into account the losses and discrepancies in the substrate thickness, the measured results are in good agreement with the electromagnetic simulations.

Subject Keywords

Instrumentation, Electrical and Electronic Engineering, Radiation, Condensed Matter Physics

URI

https://hdl.handle.net/11511/42399

Journal

JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES

DOI

https://doi.org/10.1007/s10762-017-0397-7

Collections

Department of Physics, Article

Suggestions

OpenMETU
Core

Mutual coupling of printed elements on a cylindrically layered structure using closed-form Green's functions Acar, R. C.; Dural, G. (EMW Publishing, 2008-01-01) A hybrid method to calculate mutual coupling of electric or magnetic current elements on a cylindrically layered structure using closed-form Green's functions is presented. When rho = rho' and phi is not very close to phi', closed-form Green's functions are employed in the calculation of MoM matrix entries. When both rho = rho' and phi = phi', series representation of the spectral domain Green's functions do not converge, therefore closed-form Green's functions can not be employed. In that case MoM matrix e...
Frequency Selective Characteristics of a Plasma Layer with Sinusoidally Varying Electron Density Profile GÜREL, ÇİĞDEM SEÇKİN; Oencue, Emrah (Springer Science and Business Media LLC, 2009-06-01) In this study reflection, absorbtion and transmission characteristics of a plasma layer having sinusoidally varying electron number density are analysed. In the analysis, plasma layer is divided into thin subslabs with constant electron number densities. The general frequency selective behavior of the plasma is investigated by varying the plasma parameters, external magnetic field excitation and sinusoidal electron distribution in order to be used in recent plasma applications.
Symmetrical and decoupled nickel microgyroscope on insulating substrate Alper, Se; Akın, Tayfun (Elsevier BV, 2004-09-21) This paper presents a symmetrical and decoupled surface micromachined gyroscope fabricated by electroforming thick nickel on a glass substrate. The symmetric structure allows matched resonant frequencies for the drive and sense vibration modes for improved sensitivity, while the decoupled drive and sense oscillation modes prevents unstable operation due to mechanical coupling, resulting in a low zero-rate output drift. The use of a glass substrate instead of a silicon substrate reduces noise due to the para...
Transformation Electromagnetics Based Analysis of Waveguides With Random Rough or Periodic Grooved Surfaces Ozgun, Ozlem; Kuzuoğlu, Mustafa (Institute of Electrical and Electronics Engineers (IEEE), 2013-02-01) A computational model is introduced which employs transformation-based media to increase the computational performance of finite methods (such as finite element or finite difference methods) for analyzing waveguides with grooves or rough surfaces. Random behavior of the roughness is taken into account by utilizing the Monte Carlo technique, which is based on a set of random rough surfaces generated from Gaussian distribution. The main objective of the proposed approach is to create a single mesh, and to ana...
Microwave Characterization of a Wafer-Level Packaging Approach for RF MEMS Devices Using Glass Frit Bonding Comart, Ilker; Topalli, Kagan; Demir, Şimşek; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2014-06-01) This paper presents the microwave characterization of a wafer level packaging approach for RF MEMS devices, using glass frit as the bonding material. Coplanar waveguide transmission lines are packaged by silicon caps to carry out the RF characterization of the package structure. Prior to bonding of the cap on the transmission lines, cap wafers are bulk micromachined to form the cavities for housing the device to be packaged and pad windows to access the RF ports of the devices. Lateral feedthroughs are desi...

Citation Formats

M. Ramzan et al., “Terahertz Bandpass Frequency Selective Surfaces on Glass Substrates Using a Wet Micromachining Process,” JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES, pp. 945–957, 2017, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/42399.