Hybrid connection of RF MEMS and SMT components in an impedance tuner

Date

2010-01-01

Author

Unlu, Mehmet
Topalli, Kagan
Atasoy, Halil Ibrahim
Demir, Şimşek
Aydın Çivi, Hatice Özlem
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

288
views

0
downloads

This paper presents a systematic construction of a model for a hybrid connected RF MEMS and SMT components in a reconfigurable impedance tuner. The double stub hybrid impedance tuner which employs a high number of MEMS switches is selected to demonstrate the feasibility of the connections. In the hybrid tuner, MEMS switches are actuated with DC bias signals, where SMT resistors de-couple RF from the DC lines. The hybrid tuner is realized in two steps, where the MEMS impedance tuner is fabricated on a glass substrate using an in-house surface micromachining process, and the SMT resistors are mounted on the glass substrate following the MEMS fabrication. The parasitics introduced by the SMT resistors and their connections in the hybrid tuner are modeled in 1-20 GHz band. The constructed model is used to simulate the hybrid impedance tuner, which is capable of matching 2(10) points on the Smith Chart, covering a wide impedance range 1.5-393 Omega in the real and -210 to 220 Omega in the imaginary parts at 18 GHz. The hybrid impedance tuner is measured for 25 switch combinations to verify the model in which a good agreement is obtained. The comparison of the simulation and measurement results show that the constructed model is successful in terms of handling parasitics of a hybrid structure up to 20 GHz where the parasitics vitally affect the device performance. (C) 2010 Elsevier GmbH. All rights reserved.

Subject Keywords

Electrical and Electronic Engineering

URI

https://hdl.handle.net/11511/43552

Journal

AEU-INTERNATIONAL JOURNAL OF ELECTRONICS AND COMMUNICATIONS

DOI

https://doi.org/10.1016/j.aeue.2010.01.008

Collections

Department of Electrical and Electronics Engineering, Article

Suggestions

OpenMETU
Core

Active clamped ZVS forward converter with soft-switched synchronous rectifier for high efficiency, low output voltage applications Acik, A; Cadirci, I (Institution of Engineering and Technology (IET), 2003-03-01) The analysis, design, and implementation of an active clamped ZVS forward converter equipped with a soft-switched synchronous rectifier (ACFC-SR), proposed for high-efficiency low output voltage DC-DC converter applications, is presented. The converter efficiency is maximised due to soft switching of the main, active clamp, synchronous rectifier, and freewheeling MOSFET switches. The operating principles of the ACFC-SR are analysed in detail, and the converter performance is compared with that of alternativ...
Performance Enhancement of the Single-Phase Series Active Filter by Employing the Load Voltage Waveform Reconstruction and Line Current Sampling Delay Reduction Methods Senturk, Osman S.; Hava, Ahmet Masum (Institute of Electrical and Electronics Engineers (IEEE), 2011-08-01) This paper proposes the waveform reconstruction method (WRM), which is utilized in the single-phase series active filter's (SAF's) control algorithm, in order to extract the load harmonic voltage component of voltage harmonic type single-phase diode rectifier loads. Employing WRM and the line current sampling delay reduction method, a single-phase SAF compensated system provides higher harmonic isolation performance and higher stability margins compared to the system using conventional synchronous-reference...
Circumferential Traveling Wave Slot Array on Cylindrical Substrate Integrated Waveguide (CSIW) Bayraktar, Omer; Aydın Çivi, Hatice Özlem (Institute of Electrical and Electronics Engineers (IEEE), 2014-07-01) Traveling wave slot array on cylindrical substrate integrated waveguide (CSIW) is designed, fabricated and measured at K-band. CSIW is formed by wrapping the substrate integrated waveguide (SIW) around the cylinder in the circumferential direction. 16 element longitudinal slot array on the broad wall of single CSIW is designed by the Elliot's design procedure. The spacings between the slot elements are determined to reduce the half power beam width (HPBW) and to obtain good matching at 25 GHz. A 4 x 16 slot...
RC Performance Evaluation of Interconnect Architecture Options Beyond the 10-nm Logic Node Kıncal, Serkan; Abraham, Mathew C.; Schuegraf, Klaus (Institute of Electrical and Electronics Engineers (IEEE), 2014-06-01) This paper summarizes the findings of an RC performance modeling approach for evaluating various material and architecture options by which interconnect wires are incorporated onto integrated circuits. For the present dual-damascene structure, the grain boundary and surface scattering modes are identified as the top contributors to resistance degradation, along with the cross-sectional area consumed by the liner/barrier layers. Self-forming barriers, a technology that provides direct Cu-insulator interfaces...
Metamaterial absorber-based sensor embedded into X-band waveguide SABAH, CUMALİ; TURKMEN-KUCUKSARİ, OZNUR; Sayan, Gönül (Institution of Engineering and Technology (IET), 2014-07-17) A novel metamaterial sensor, integrated with an X-band waveguide, is proposed for high-resolution measurements of variations in the dielectric constant and/or the thickness of a superstrate layer that covers a pair of absorber unit cells. Variations in superstrate parameters are potentially caused by physical, chemical or biological factors, and can be detected by measuring the corresponding shifts in the resonance frequency of the metamaterial sensor. It is estimated by simulation results that resolution l...

Citation Formats

M. Unlu, K. Topalli, H. I. Atasoy, Ş. Demir, H. Ö. Aydın Çivi, and T. Akın, “Hybrid connection of RF MEMS and SMT components in an impedance tuner,” AEU-INTERNATIONAL JOURNAL OF ELECTRONICS AND COMMUNICATIONS, pp. 748–756, 2010, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/43552.