Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process

Aydın, Gülşah Demirhan
Akın, Tayfun
This paper reports the development of resonance-based temperature sensors using a wafer level vacuum packaged SOI MEMS process which is normally used to implement various MEMS sensors, including MEMS gyroscopes and accelerometers. Implementing MEMS temperature sensors in such a MEMS process together with sensitive MEMS sensors allows obtaining temperature data, which is very useful for the compensation of a number of parameters of these MEMS sensors for obtaining improved performance from these sensors. Four different types of temperature sensors are designed considering two types of actuation mechanisms (varying gap and varying overlap) and two different mass types (H-shaped single mass and tuning fork double mass), and their design and model analysis are verified using finite element modelling (FEM) simulations. All of the sensors are fabricated in the same die by using the advanced MEMS (aMEMS) process. The fabricated sensors are combined with necessary readout electronics for each structure in LT Spice environment, and their proper operations are verified in MATLAB Simulink. The temperature sensing technique is based on the frequency variations due to the thermal expansion coefficient mismatch between the glass substrate and the silicon that causes a mechanical strain on the resonator and to a smaller extent, by the temperature variation of Si Young modulus, which influences the resonance frequency. The performance of each sensor is measured using the real time data acquisition from the resonators where resonance frequency and resonator controller outputs are monitored for different temperatures. The best performance is obtained with the tuning fork double mass together with varying gap structures, where the temperature coefficient of frequency (TCF) values are measured as ‑128 ppm/K in the measurement range in the hot plate and as ‑114 ppm/K in the measurement range in the oven.
Advanced Materials Letters


Investigation of as-quenched and tempered commercial steels by Magnetic Barkhausen Noise method
Gür, Cemil Hakan; Çam, İbrahim (Inderscience Publishers, 2006-01-01)
This study aims to characterise as-quenched and tempered steels by the Magnetic Barkhausen Noise method, and to contribute to optimisation of heat treatment processes. Identical austenitisation and quenching procedures were applied to SAE 1040 and SAE 4140 specimens to eliminate the effect of grain size. Samples were tempered at 200°C and 600°C for 2 hours. Microstructures were characterised by metallographic examinations and hardness measurements. Amplitude, position and frequency spectrum of signals were ...
Simulation of equal channel angular pressing applied to produce structures with ultrafine-sized grains
Karpuz, Pinar; Şimşir, Caner; Gür, Cemil Hakan (Inderscience Publishers, 2009-01-01)
Severe plastic deformation methods are of great interest in industrial forming applications, as they give rise to significant refinement in microstructures and improvements in mechanical and physical properties. In the 'equal channel angular pressing (ECAP)', which is the most common method for production of ultrafine grained bulk samples, very high plastic strains are introduced into the bulk material without any change in cross section. In this study, the plastic deformation behaviour of the materials sub...
Electrostatic Stabilization of Alumina Nanopowder Suspensions
Çınar, Simge (American Scientific Publishers, 2014-03-01)
Electrostatic stabilization has an impact on a broad range of applications. Previous research has shown that concentrated alumina nanopowder suspensions can be stabilized at specific ranges of ionic strength and pH. This study investigated the stability of alumina nanopowder suspensions in terms of viscosity measurements as a function of different electrolyte concentration and suspension pH. Using alumina nanopowders with an average particle size of about 50 nm, stable suspensions were obtained with 0.020 ≤...
Surface-enhanced Raman scattering spectroscopy via gold nanostars
Nalbant Esentürk, Emren (Wiley, 2009-01-01)
Anisotropic metallic nanoparticles (NPs) have unique optical properties, which lend them to applications such as surface-enhanced Raman scattering (SERS) spectroscopy. Star-shaped gold (Au) NPs were prepared in aqueous solutions by the seed-mediated growth method and tested for Raman enhancement using 2-mercaptopyridine (2-MPy) and crystal violet (CV) probing molecules. For both molecules, the SERS activity of the nanostars was notably stronger than that of the spherical Au NPs of similar size. The Raman en...
Ambient synthesis of nanomaterials by in situ heterogeneous metal/ligand reactions
Chang, Boyce S.; Thomas, Brijith; Chen, Jiahao; Tevis, Ian D.; Karanja, Paul; Çınar, Simge; Venkatesh, Amrit; Rossini, Aaron J.; Thuo, Martin M. (Royal Society of Chemistry (RSC), 2019-08-07)
Coordination polymers are ideal synthons in creating high aspect ratio nanostructures, however, conventional synthetic methods are often restricted to batch-wise and costly processes. Herein, we demonstrate a non-traditional, frugal approach to synthesize 1D coordination polymers by in situ etching of zerovalent metal particle precursors. This procedure is denoted as the heterogeneous metal/ligand reaction and was demonstrated on Group 13 metals as a proof of concept. Simple carboxylic acids supply the etch...
Citation Formats
G. D. Aydın and T. Akın, “Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process,” Advanced Materials Letters, pp. 0–0, 2020, Accessed: 00, 2020. [Online]. Available: