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Investigation of on-wafer TRL calibration accuracy dependence on transitions and probe positioning
Date
2006-09-12
Author
Atasoy, H.I.
Unlu, M.
Topalli, K.
Istanbulluoglu, I.
Temocin, E.U.
Bayraktar, O.
Demir, Şimşek
Civi, O.
Koç, Seyit Sencer
Akın, Tayfun
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This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
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This paper presents the effects of various transition types from the measurement plane to the reference plane in TRL calibration and probe positioning effects for on wafer measurements of CPW based devices. Fourteen different transition types, with direct, linear and exponential transitions, including 3 different variations of ground-signal-ground (GSG) spacing are examined. To observe the performance of the transitions, simple CPW transmission lines of different characteristic impedances are fabricated using standard lithography techniques on glass substrate and S-parameters are measured in 4.5-20 GHz band. Results are compared with electromagnetic simulations. The effects of probe misplacement along the lateral and horizontal axis are also investigated.
Subject Keywords
Calibration
,
TRL
,
Coplanar waveguide
,
Transmission line transitions
URI
https://hdl.handle.net/11511/46260
DOI
https://doi.org/10.1109/eumc.2006.281401
Collections
Department of Electrical and Electronics Engineering, Conference / Seminar