The First Fabricated Dual-Band Uncooled Infrared Microbolometer Detector with a Tunable Micro-Mirror Structure

Date

2012-04-27

Author

Keskin, Selcuk
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

191
views

0
downloads

This paper presents the first fabricated dual-band uncooled resistive infrared thermal microbolometer implemented with a resistive microbolometer and a tunable micro-mirror structure. Tunable reflective micro-mirrors are suspended underneath the suspended resistive microbolometers having a 35 mu m pixel pitch, and they are switched between two positions by the application of an electrostatic force for obtaining different responses in two wavelength infrared atmospheric windows, namely the 3-5 and 8-14 mu m, by tuning the optical tunable resonant cavity. This approach allows assessing the actual temperature of the viewed scene by comparing the responses of the detector in these two wavelength infrared atmospheric windows. The absorption coefficients of the detector are simulated by using the Cascaded Transmission Line (CTL) model, and the sacrificial layer thicknesses are optimized to obtain maximum absorption from these two wavelength regions. The absorption coefficients obtained from the measurements are in correspondence with the simulations. The responsivity measurements results shows that the absorption is decreased in an amount of 17.9 % in the 3-5 mu m spectral band, while the absorption is increased in an amount of 8.5 % in the 8-14 mu m spectral band, depending on the micro-mirror position. These initial results are promising for the dual-band detection using uncooled infrared microbolometer detectors.

Subject Keywords

Uncooled infrared detectors, Microbolometers, Dual-band infrared (IR) detector

URI

https://hdl.handle.net/11511/49316

DOI

https://doi.org/10.1117/12.964551

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

A low-cost small pixel uncooled infrared detector for large focal plane arrays using a standard CMOS process Eminoglu, S; Tanrikulu, MY; Tezcan, DS; Akın, Tayfun (2002-04-03) This paper reports the development of a low-cost, small pixel uncooled infrared detector using a standard CMOS process. The detector is based on a suspended and thermally isolated p(+)-active/n-well diode whose forward voltage changes due to an increase in the pixel temperature with absorbed infrared radiation. The detector is obtained with simple post-CMOS etching steps on dies fabricated using a standard n-well CMOS process. The post-CMOS process steps are achieved without needing any deposition or lithog...
Development of high performance uncooled infrared detector materials Kebapçı, Başak; Akın, Tayfun; Turan, Raşit; Department of Micro and Nanotechnology (2011) This thesis reports both the optimizations of the vanadium oxide (VOx) thin film as an active infrared detector material by the magnetron sputtering deposition method and its use during fabrication of proper resistors for the microbolometers. Vanadium oxide is a preferred material for microbolometers, as it provides high TCR value, low noise, and reasonable resistance, and a number of high-tech companies have used this material to obtain state-of-the-art microbolometer arrays. This material is first used in...
Development of high fill factor and high performance uncooled infrared detector pixels Küçük, Şeniz Esra; Akın, Tayfun; Department of Electrical and Electronics Engineering (2011) This thesis presents the design, fabrication and characterization of high performance and high fill factor surface micromachined uncooled infrared resistive microbolometer detectors which can be used in large format focal plane arrays (FPAs). The detector pixels, which have a pixel pitch of 25 μm, are designed and fabricated as two-level structures using the enhanced sandwich type resistor while the active material is selected as Yttrium Barium Copper Oxide (YBCO). First level of the pixel structure is allo...
High performance focal plane array technologies from short to long wavelength infrared bands Arslan, Yetkin; Beşikci, Cengiz; Department of Electrical and Electronics Engineering (2014) This thesis work covers the development of three different state of the art infrared sensor technologies: quantum well infrared photodetectors (QWIPs), HgCdTe sensors and extended InGaAs photodetectors. QWIP is the leading member of the quantum structure infrared photodetector family providing excellent uniformity and stability with field proven performance. The utilization of the InP/In0.48Ga0.52As multi-quantum well structure (instead of the standard AlGaAs/GaAs material system) for the implementation of ...
A low-cost 128x128 uncooled infrared detector array in CMOS process Eminoglu, Selim; Tanrikulu, Mahmud Yusuf; Akın, Tayfun (2008-02-01) This paper discusses the implementation of a low-cost 128 x 128 uncooled infrared microbolometer detector array together with its integrated readout circuit (ROC) using a standard 0.35 mu m n-well CMOS and post-CMOS MEMS processes. The detector array can be created with simple bulk-micromachining processes after the CMOS fabrication, without the need for any complicated lithography or deposition steps. The array detectors are based on suspended p(+)-active/n-well diode microbolometers with a pixel size of 4...

Citation Formats

S. Keskin and T. Akın, “The First Fabricated Dual-Band Uncooled Infrared Microbolometer Detector with a Tunable Micro-Mirror Structure,” 2012, vol. 8353, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/49316.