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METU MEMS Research and Applications Center (METU-MEMS)

MEMS activities at METU have been continuing since 1995 in the framework of a number of national/international projects, including NATO-SfS (TU-MICROSYSTEMS), US NSF, COST, FP6 (AMICOM), and several national projects. During these projects, a wide variety of sensors and devices have been developed, such as pressure sensors, CMOS infrared detectors, accelerometers, gyroscopes, humidity sensors, temperature sensors, frost sensors, biosensors, energy harvesters, and various RF MEMS componentsIn 1998, METU took over a 35 Million Euros invested IC fabrication facility from the government, and this facility has been converted to METU-MEMS Center. The infrastructure of the facility has been upgraded substantially with national funds totaling over 20 Million Euros, and the facility allows 4”, 6”, and partially 8” wafer processing. However, there is still need for funding to hire more researchers and train them in this high-tech field, to develop standard MEMS fabrication processes, to further upgrade the facility by purchasing some critical equipment, and to increase international activities for networking and collaboration of the Center. These will help (i) to complete the infrastructure for development of advanced industrial sensor systems and for easy collaboration with European research centers with the use of compatible equipments and standard fabrication procedures, (ii) to increase the involvement of the Center and Turkish industrial companies in FP7 projects, (iii) to extend the research subjects of the Center to new and exciting fields, (iv) to increase the interest of the industry and young scientists to MEMS, and (v) to create new job opportunities and better working conditions which can attract Turkish researchers abroad to Turkey, helping to reverse the brain-drain. In summary, this proposal will enable a high quality research center, which is already active in thematic priorities’ domain of the EC FP7 to become more integrated in the European Research Area.